Evaluation of resolution of flexure parallel mechanisms for ultraprecision manipulation

Review of Scientific Instruments

Volumn 75, Issue 9, 2004, Pages 3016-3024

  Pham, Huy Hoang ^a   Chen, I Ming ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR DISTRIBUTION; FLEXURE PARALLEL MECHANISMS (FPM); MECHANICAL DESIGN; RESOLUTION TRANSMISSION SCALE;

ACTUATORS; ALGORITHMS; DEGREES OF FREEDOM (MECHANICS); FRICTION; NATURAL FREQUENCIES; STIFFNESS; STRUCTURAL DESIGN; VACUUM;

BENDING STRENGTH;

EID: 7544220938     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1786351     Document Type: Article

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