Kinematics, Workspace and Static Analyses of 2-DOF Flexure Parallel Mechanism

Proceedings of the 7th International Conference on Control, Automation, Robotics and Vision, ICARCV 2002

Volumn , Issue , 2002, Pages 968-973

  Pham, Huy Hoang ^a   Chen, I Ming ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

PARALLEL MECHANISM; VACCUM COMPATIBILITY; WORKSPACE; ANGULAR MOTION; PARALLEL SYSTEMS; ULTRAVIOLET LITHOGRAPHY;

COMPUTER AIDED ANALYSIS; FINITE ELEMENT METHOD; FRICTION; KINEMATICS; LITHOGRAPHY; OPTICAL DEVICES; PRECISION BALANCES; SEMICONDUCTOR MATERIALS; SPRINGS (COMPONENTS); STIFFNESS; THICKNESS MEASUREMENT; TORSIONAL STRESS; ACTUATORS; MATHEMATICAL MODELS; MOTION COMPENSATION; NATURAL FREQUENCIES; POSITION CONTROL;

MANIPULATORS; KINEMATICS;

EID: 2342423708     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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