A microfluidic system with embedded acoustic wave sensor for in situ detection of dynamic fluidic properties

Microelectronic Engineering

Volumn 87, Issue 4, 2010, Pages 658-662

  Zhang, Kai ^a   Zhao, Libo ^b   Guo, Shishang ^b   Shi, Baoxian ^a   Chen, Yong ^c   Chan, Helen L W ^a   Wang, Yu ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^c ECOLE NORMALE SUPÉRIEURE   (France)

Author keywords

Acoustic wave sensor; Dynamic fluids; Frequency shift; In situ detection; Microfluidic system

Indexed keywords

ACOUSTIC WAVE SENSORS; BIOCHEMICAL PROCESS; DIFFERENT SERVICES; DYNAMIC FLUIDS; FLOWING FLUID; FREQUENCY SHIFT; IN-SITU; IN-SITU MONITORING; MICRO FLUIDIC SYSTEM; MICRO-PARTICLES; MICROFLUIDIC CHANNEL; RESONANCE FREQUENCIES; RESONANT FREQUENCIES; SOFT-LITHOGRAPHY;

ACOUSTIC WAVES; FLUIDIC DEVICES; FLUIDS; FREQUENCY SHIFT KEYING; LITHOGRAPHY; MICROFLUIDICS; MONITORING; NATURAL FREQUENCIES; OXIDE MINERALS; QUARTZ; SENSORS; VISCOSITY;

ACOUSTICS;

EID: 75149168272     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.09.008     Document Type: Article

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