Ta2O5-and TiO2-based nanostructures made by atomic layer deposition

Nanotechnology

Volumn 21, Issue 3, 2010, Pages

  Kemell, Marianna ^a   Härkönen, Emma ^a   Pore, Viljami ^a   Ritala, Mikko ^a   Leskelä, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA MEMBRANES; CHEMICAL ETCHING; ELECTROCHEMICAL CAPACITOR; METHYLENE BLUE; NANOROD ARRAYS; NANOTUBULAR; PHOTOCATALYTIC ACTIVITIES; PORE WALL; POROUS ALUMINA MEMBRANES; PT NANOPARTICLES; SI SUBSTRATES; THIN FILM MEMBRANE; TIO; UV ILLUMINATIONS;

ALUMINA; ATOMIC LAYER DEPOSITION; ATOMS; CRYSTAL ATOMIC STRUCTURE; MEMBRANES; NANORODS; NANOTUBES; PHOTOCATALYSIS; PLATINUM; SILICON; TANTALUM; THIN FILM DEVICES;

FILM PREPARATION;

EID: 74949122529     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/3/035301     Document Type: Article

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