Preparation and electrochemical properties of pure lithium cobalt oxide films by electron cyclotron resonance sputtering

Journal of Power Sources

Volumn 189, Issue 1, 2009, Pages 416-422

  Hayashi, Masahiko ^a   Takahashi, Masaya ^a   Shodai, Takahisa ^a  

^a NTT CORPORATION   (Japan)

Author keywords

All solid state thin film lithium battery; ECR sputtering; Electrode utilization; LiCoO2; Raman spectrometry

Indexed keywords

COBALT; COBALT COMPOUNDS; CYCLOTRONS; ELECTROCHEMICAL PROPERTIES; ELECTRON CYCLOTRON RESONANCE; LITHIUM; LITHIUM BATTERIES; LITHIUM COMPOUNDS; OXIDE FILMS; RESONANCE; SPECTROMETERS; SPECTROMETRY; TARGETS; THIN FILM DEVICES;

ALL-SOLID-STATE THIN-FILM LITHIUM BATTERY; ECR SPUTTERING; ELECTRON-CYCLOTRON-RESONANCE SPUTTERING; EMISSION SPECTROMETRIES; HIGH-TEMPERATURE PHASE; IMPURITY PHASE; LICOO2; LITHIUM COBALT OXIDES; RAMAN SPECTROMETRY; THIN-FILM BATTERIES;

FILM PREPARATION;

EID: 62349108014     PISSN: 03787753     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpowsour.2008.07.050     Document Type: Article

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