Structural and optical properties of indium tin oxide (ITO) thin films with different compositions prepared by electron beam evaporation

Vacuum

Volumn 84, Issue 6, 2010, Pages 864-869

  Senthilkumar, V ^a   Vickraman, P ^a   Jayachandran, M ^b   Sanjeeviraja, C ^c  

^a GANDHIGRAM RURAL UNIVERSITY   (India)

^b CENTRAL ELECTROCHEMICAL RESEARCH INSTITUTE   (India)

^c ALAGAPPA UNIVERSITY   (India)

Author keywords

Dispersion energy; ITO thin films; Packing density; SEM; XRD

Indexed keywords

DISPERSION ENERGIES; ITO THIN FILMS; PACKING DENSITY; SEM; XRD;

ABSORPTION; DISPERSION (WAVES); ELECTRON BEAMS; EVAPORATION; FILM PREPARATION; INDIUM; INDIUM COMPOUNDS; OXIDE FILMS; OXYGEN; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS; TIN; TITANIUM COMPOUNDS; VAPORS; X RAY DIFFRACTION;

OPTICAL FILMS;

EID: 74649084364     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.11.017     Document Type: Article

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