Comparative mid- and far-infrared spectroscopy of nitrogen-oxygen complexes in silicon

Physica B: Condensed Matter

Volumn 404, Issue 23-24, 2009, Pages 4549-4551

  Alt, H Ch ^a   Wagner, H E ^a  

^a MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Czochralski silicon; Infrared spectroscopy; Nitrogen oxygen complexes; Shallow donors

Indexed keywords

CHEMICAL COMPOSITIONS; CZOCHRALSKI SILICON; FAR-INFRARED SPECTROSCOPY; LOCAL VIBRATIONAL MODE; LONG-TERM ANNEALING; MICROSCOPIC STRUCTURES; NITROGEN-DOPED CZOCHRALSKI SILICONS; OXYGEN COMPLEXES; SHALLOW DONORS; TEMPERATURE RANGE; THEORETICAL MODELING; THERMAL DECAYS; THERMODYNAMIC EQUILIBRIA; VIBRATIONAL STATE;

NITROGEN; OXYGEN;

INFRARED SPECTROSCOPY;

EID: 74349091623     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2009.08.104     Document Type: Article

References (15)

1. Navarro H., et al. Solid State Commun. 58 (1986) 151
2. Suezawa M., et al. Japan J. Appl. Phys. 25 (1986) L859
3. Alt H.Ch., et al. Appl. Phys. Lett. 87 (2005) 151909
4. Wagner H.E., et al. Appl. Phys. Lett. 91 (2007) 152102
5. Suezawa M., et al. Japan J. Appl. Phys. 27 (1988) 62
6. Fujita N., et al. Appl. Phys. Lett. 91 (2007) 051914
7. Abe T., et al. In: Huff H.R., and Kriegler R.J. (Eds). Semiconductor Silicon 1981 (1981), Electrochemical Society, Pennington, NJ 54
8. Stein H.J. Appl. Phys. Lett. 43 (1983) 296
9. Wagner P., et al. Appl. Phys. A 46 (1988) 73
10. Jones R., et al. Semicond. Sci. Tech. 9 (1994) 2145
11. Inoue N., et al. Solid State Phenomena 108-109 (2005) 609
12. Inoue N., and Nakatsu M. Mater. Sci. Eng. B 134 (2006) 202
13. Fujita N., et al. Physica B 401-402 (2007) 159
14. Gali A., et al. J. Phys. Condens. Matter 8 (1996) 7711
15. Voronkov V.V., et al. J. Appl. Phys. 89 (2001) 4289