ALD of vanadium oxide

ECS Transactions

Volumn 25, Issue 4, 2009, Pages 29-37

  Musschoot, J ^a   Deduytsche, D ^a   Van Meirhaeghe, R L ^a   Detavernier, C ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; OPTICAL EMISSION SPECTROSCOPY; OXIDES; OXYGEN; VANADIUM PENTOXIDE;

OXYGEN PLASMAS; THERMAL PROCESS; VANADIA; VANADIUM OXIDES; VANADYL; WATER BASED; WIDE TEMPERATURE RANGES;

ATOMIC LAYER DEPOSITION;

EID: 74249087466     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3205040     Document Type: Conference Paper

References (7)

1. J. Keränen, A. Auroux, S. Ek, L. Niinistö, Appl. Cat. A: General, 228, 213 (2002).
2. J. C. Badot, S. Ribes, E. B. Yousfi, V. Vivier, J. P. Pereira-Ramos, N. Baffler, D. Lincot, Electrochem. Solid-State Lett., 3, 485 (2000).
3. M. Putkonen, T. Luiskala, J. Lappalainen, ALD 2008 Book of Abstracts TueA2-3, 8th international conference on atomic layer deposition, Bruges, Belgium (2008).
4. J. Musschoot, D. Deduytsche, H. Poelman, J. Haemers, R. L. Van Meirhaeghe, S. Van den Berghe, C. Detavernier, J. Electrochem. Soc., 156, P122 (2009).
5. S. B. S. Heil, J. L. van Hemmen, M. C. M. van de Sanden, W. M. M. Kessels, J. Appl. Phys., 103, 103302 (2008).
6. Q. Xie, J. Musschoot, D. Deduytsche, R. L. Van Meirhaeghe, C. Detavernier, S. Van den Berghe, Y.-L. Jiang, G.-P. Ru, B.-Z. Li, X.-P. Qu, J. Electrochem. Soc., 155, H688 (2008).
7. T. Massalski (editor), Assessed V-O Phase Diagram, Binary alloy phase diagrams [CDROM], ASM International (1996).