Annealing temperature dependent on structural, optical and electrical properties of indium oxide thin films deposited by electron beam evaporation method

Current Applied Physics

Volumn 10, Issue 3, 2010, Pages 880-885

  Senthilkumar, V ^a   Vickraman, P ^a  

^a GANDHIGRAM RURAL UNIVERSITY   (India)

Author keywords

Annealing process; Indium oxide; Nanocrystals; Optical band gap; Thin films

Indexed keywords

ANNEALING PROCESS; ANNEALING TEMPERATURES; CHEMICAL COMPOSITIONS; DEPOSITED FILMS; ELECTRON BEAM EVAPORATION; ELECTRON BEAM EVAPORATION METHODS; FILM STRUCTURE; INDIUM OXIDE; OPTICAL AND ELECTRICAL PROPERTIES; PACKING DENSITY; PREFERENTIAL ORIENTATION; SPECTRAL DATA; STRUCTURAL AND OPTICAL PROPERTIES; STRUCTURAL STUDIES; XRD;

ANNEALING; ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; ELECTRON BEAMS; ENERGY GAP; EVAPORATION; INDIUM; NANOCRYSTALS; OPTICAL BAND GAPS; OXYGEN; REFRACTIVE INDEX; SURFACE STRUCTURE; THIN FILMS; VAPORS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE FILMS;

EID: 73549102169     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2009.10.014     Document Type: Article

References (28)

1. x semiconductor films deposited on glass substrates for transparent electronics. J. Non Cryst. Solids 352 (2006) 2315-2318
2. 3-ZnO thin films by ultrasonic spray pyrolysis. Mater. Sci. Eng. B 127 (2006) 267-271
3. Chopra K.L., Major S., and Pandya D.K. Transparent conductors - a status review. Thin Solid Films 102 (1983) 1-46
4. Malar P., Mohanty B.C., and Kasiviswanathan S. Growth and Rutherford backscattering spectrometry study of direct current sputtered indium oxide films. Thin Solid Films 488 (2005) 26-33
5. Weiher R.L., and Ley R.P. Optical properties of indium oxide. J. Appl. Phys. 37 (1966) 299-302
6. Pan C.A., and Ma T.P. High-quality transparent conductive indium oxide films prepared by thermal evaporation. Appl. Phys. Lett. 37 (1980) 163 (3 pages)
7. Cho J.S., Yoon K.H., and Koh S.K. Material properties of indium oxide films prepared by oxygen ion assisted deposition. J. Appl. Phys. 89 (2001) 3223-3228
8. x thin films. Thin Solid Films 305 (1997) 116-123
9. 3 films as tunnel barriers. J. Appl. Phys. 75 (1994) 2572-2577
10. 3 on (0 0 1), InAs, MgO and yttria-stabilized zirconia. Appl. Phys. Lett. 62 (1993) 2332 (3 pages)
11. Suh S., and Hoffmamn D.M. General synthesis of homoleptic indium alkoxide complexes and the chemical vapor deposition of indium oxide films. J. Am. Chem. Soc. 122 (2000) 9396-9404
12. 3 nanocrystalline films and powders. Surf. Sci. 454-456 (2000) 396-401
13. Moulder J.F., Stickle W.F., Sool P.E., and Bomben K.D. Handbook of X-ray Photoelectron Spectroscopy, a Reference Book of Standard Spectra for Identification and Interpretation of XPS Data (1992), Perkin-Elmer Corp., Eden Prairie
14. Atashbar M.Z., Gong B., Sun H.T., Wlodarski W., and Lamb R. Thin Solid Films 354 (1999)
15. Kim N.H., Myung J.H., Kim H.W., and Lee C. Phys. Stat. Sol. (a) 202 (2005) 108
16. Lee J.-H., and Park B.-O. Surf. Coat. Technol. 184 (2004) 102-107
17. Phatak G., and Lal R. Structural and electrical properties of cadmium oxide films deposited by the activated reactive evaporation technique. Thin Solid Films 209 (1992) 240-249
18. JCPDS Card No. 06-0416.
19. Han H., Mayer J.W., and Alford T.L. Band gap shift in the indium-tin-oxide films on polyethylene napthalate after thermal annealing in air. J. Appl. Phys. 100 (2006) 083715 (6 pages)
20. Swanepoel R. Determination of the thickness and optical constants of amorphous silicon. J. Phys. E: Sci. Instrum. 16 (1983) 1214-1222
21. Bragg W.L., and Pippard A.B. The form birefringence of macromolecules. Acta Crystallogr. 6 (1953) 865-867
22. Ali H.M., Abd EI-Raheem M.M., Megahed N.M., and Mohamed H.A. Optimization of the optical and electrical properties of electron beam evaporated aluminum-doped zinc oxide films for opto-electronic applications. J. Phys. Chem. Solids 67 (2006) 1823-1829
23. Yoldas B.E., and Partlow P.W. Formation of broad band antireflective coatings on fused silica for high power laser applications. Thin films 129 (1985) 1-14
24. Mobzen W.W. J. Vac. Sci. Technol. 12 (1975) 99
25. Chopra K.L., and Das S.R. Thin Film Solar Cells (1983), Plenum Press, New York
26. Naseem S., Iqbal M., and Hussain K. Optoelectrical and structural properties of evaporated indium oxide thin films. Sol. Energy Mater. Sol. Cells 31 (1993) 155-162
27. Thilakan P., and Kumar J. Studies on the preferred orientation changes and its influenced properties on ITO thin films. Vacuum 48 (1997) 463-466
28. R.E.I. Scropp, C.E. Matovich, P.K. Bhatt, A.K. Madan, 20th IEEE Photovoltaic Spec. Conf., Las Vegas, USA, 1988.