Identification of SiC polytypes by etched Si-face morphology

Materials Science in Semiconductor Processing

Volumn 12, Issue 3, 2009, Pages 113-117

  Yang, Ying ^a   Chen, Zhiming ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Etching pit; Polytype; Raman; SiC

Indexed keywords

ETCHING PITS; POLYTYPE; POLYTYPES; RAMAN SPECTRA; SIC POLYTYPES; WET-ETCH;

MORPHOLOGY; RAMAN SPECTROSCOPY; SILICON; SILICON CARBIDE; SULFUR COMPOUNDS;

ANISOTROPIC ETCHING;

EID: 73349120243     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2009.08.004     Document Type: Article

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