Preparation of AlSb polycrystalline thin films by magnetron sputtering

Taiyangneng Xuebao/Acta Energiae Solaris Sinica

Volumn 30, Issue 11, 2009, Pages 1461-1464

  Yang, Kai ^a   Xu, Fu ^a   Wu, Lili ^a   Zhang, Jingquan ^a   Feng, Lianghuan ^a   Li, Wei ^a   Cai, Yaping ^a   Li, Bing ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

AlSb polycrystalline thin film; Magnetron sputtering; Solar cell

Indexed keywords

ALSB POLYCRYSTALLINE THIN FILM; ANNEALED SAMPLES; ANNEALING TEMPERATURES; ATOMIC FORCE MICROSCOPES; ATOMIC RATIO; FACE CENTERED CUBIC STRUCTURE; FILM SURFACES; GRAIN SIZE; POLYCRYSTALLINE; POLYCRYSTALLINE FILM; POLYCRYSTALLINE THIN FILM; TARGET COMPOSITION; X RAY FLUORESCENCE;

ANNEALING; ATOMS; FILM GROWTH; FILM PREPARATION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MAGNETRONS; SOLAR CELLS; THIN FILM DEVICES; THIN FILMS;

GRAIN GROWTH;

EID: 73349115843     PISSN: 02540096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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