Silicon nitride membrane photonics

Journal of Optics A: Pure and Applied Optics

Volumn 11, Issue 11, 2009, Pages

  Pernice, W H P ^a   Li, M ^a   Gallagher, D F G ^b   Tang, H X ^a  

^a Yale University   (United States)

^b Photon Design   (United Kingdom)

Author keywords

Metallic grating couplers; Photonic crystal devices; Silicon nitride

Indexed keywords

1550 NM; COUPLING LOSS; DESIGN SCHEME; ETCHING STEP; LOW COST FABRICATION; LOW LOSS; METALLIC GRATINGS; METALLIC PHOTONIC CRYSTALS; NANOPHOTONIC CIRCUITS; PHOTONIC CIRCUITS; PHOTONIC CRYSTAL DEVICES; PHOTONIC CRYSTAL WAVEGUIDE; PROPAGATION LOSS; SILICON NITRIDE MEMBRANE; SILICON PHOTONIC CRYSTALS; TE-POLARIZED LIGHT; WAVE-GUIDING;

CRYSTAL DEFECTS; DIFFRACTION GRATINGS; ELECTRIC LOSSES; LASER OPTICS; NANOPHOTONICS; OPTICAL WAVEGUIDES; SILICON NITRIDE; WAVEGUIDES;

PHOTONIC CRYSTALS;

EID: 72649106049     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/11/11/114017     Document Type: Article

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