Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

Russian Microelectronics

Volumn 38, Issue 5, 2009, Pages 320-326

  Bobrinetskii, I I ^a,b  

^a NATIONAL RESEARCH UNIVERSITY OF ELECTRONIC TECHNOLOGY   (Russian Federation)

^b OOO Nanosensor   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTION CHANNEL; DEPOSITION FROM SOLUTIONS; ELECTROKINETIC; FUNCTIONAL DEVICES; MICROELECTRONIC TECHNOLOGIES; PARALLEL INTEGRATION; SENSOR ELEMENTS; SENSOR TECHNOLOGIES; THIN-FILM STRUCTURE;

CARBON FILMS; MICROELECTRONICS; SENSORS; THIN FILMS;

CARBON NANOTUBES;

EID: 72449206781     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063739709050047     Document Type: Article

References (24)

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