An approximate formulation of the effective indentation modulus of elastically anisotropic film-on-substrate systems

International Journal of Applied Mechanics

Volumn 1, Issue 3, 2009, Pages 515-525

  Li, T L ^a   Lee, J H ^a   Gao, Y F ^a,b  

^a University of Tennessee Knoxville   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

anisotropic elasticity; film on substrate system; Indentation modulus

Indexed keywords

ANISOTROPIC ELASTICITY; APPLIED LOADS; CIRCULAR CONTACTS; CLOSED FORM; CONTACT RADIUS; EFFECTIVE MODULI; ELASTIC PROPERTIES; FILM MODULUS; FILM-ON-SUBSTRATE SYSTEM; FINITE ELEMENT SIMULATIONS; FRICTIONLESS CONTACTS; INDENTATION DEPTH; INDENTATION MODULUS; INDENTER SHAPE; INDENTERS; NANOINDENTATION TECHNIQUES; RADIAL COORDINATES; SHAPE AND SIZE; STROH FORMALISM; TWO-DIMENSIONAL FOURIER TRANSFORM;

ANISOTROPY; ELASTICITY; GREEN'S FUNCTION; SUBSTRATES; TWO DIMENSIONAL;

NANOINDENTATION;

EID: 72449190980     PISSN: 17588251     EISSN: 1758826X     Source Type: Journal    
DOI: 10.1142/S1758825109000241     Document Type: Article

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