메뉴 건너뛰기




Volumn 41, Issue 3, 2009, Pages 189-201

Fabrication and characterization of porous silicon layers for applications in optoelectronics

Author keywords

Photoluminescence; Photonic crystals; Porous silicon; Raman peak; Reflectivity

Indexed keywords

AFM; ANODIZATIONS; ETCHING TIME; HF CONCENTRATION; LOWER FREQUENCIES; OPTICAL PHONONS; POROUS SILICON LAYERS; RAMAN MEASUREMENTS; RAMAN PEAK; ROOM-TEMPERATURE PHOTOLUMINESCENCE; SEM IMAGE; SILICON CRYSTALLITES;

EID: 72449188101     PISSN: 03068919     EISSN: 1572817X     Source Type: Journal    
DOI: 10.1007/s11082-009-9341-y     Document Type: Article
Times cited : (29)

References (32)
  • 1
    • 0037429813 scopus 로고    scopus 로고
    • Tailoring the photonic band gap of a porous silicon dielectric mirror
    • 10.1063/1.1559420 2003ApPhL.82.1512A
    • V. Agrawal J.A. del Rio 2003 Tailoring the photonic band gap of a porous silicon dielectric mirror Appl. Phys. Lett. 82 10 1512 1514 10.1063/1.1559420 2003ApPhL..82.1512A
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.10 , pp. 1512-1514
    • Agrawal, V.1    Del Rio, J.A.2
  • 2
    • 0035361466 scopus 로고    scopus 로고
    • A porous silicon LED based on a standard BCD technology
    • 10.1016/S0925-3467(01)00026-X 2001OptMa.17.91B
    • G. Barillaro F. Pieri U. Mastromatteo 2001 A porous silicon LED based on a standard BCD technology Opt. Mater. 17 1-2 91 94 10.1016/S0925-3467(01)00026-X 2001OptMa..17...91B
    • (2001) Opt. Mater. , vol.17 , Issue.12 , pp. 91-94
    • Barillaro, G.1    Pieri, F.2    Mastromatteo, U.3
  • 3
    • 0033726229 scopus 로고    scopus 로고
    • Porous silicon: A quantum sponge structure for silicon based optoelectronics
    • DOI 10.1016/S0167-5729(99)00012-6
    • O. Bisi S. Ossicini L. Pavesi 2000 Porous silicon: a quantum sponge structure for silicon based optoelectronics Surf. Sci. Rep. 38 1 126 10.1016/S0167-5729(99)00012-6 (Pubitemid 30882892)
    • (2000) Surface Science Reports , vol.38 , Issue.1 , pp. 1-126
    • Bisi, O.1    Ossicini, S.2    Pavesi, L.3
  • 4
    • 0028532193 scopus 로고
    • Lateral photovoltaic effect in porous silicon
    • 10.1063/1.112733 1994ApPhL.65.2332B
    • W. Boeringer Daniel R. Tsu 1994 Lateral photovoltaic effect in porous silicon Appl. Phys. Lett. 65 18 2332 2334 10.1063/1.112733 1994ApPhL..65.2332B
    • (1994) Appl. Phys. Lett. , vol.65 , Issue.18 , pp. 2332-2334
    • Boeringer Daniel, W.1    Tsu, R.2
  • 5
    • 0141775174 scopus 로고
    • Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
    • 10.1063/1.103561 1990ApPhL.57.1046C
    • L.T. Canham 1990 Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers Appl. Phys. Lett. 57 1046 1048 10.1063/1.103561 1990ApPhL..57.1046C
    • (1990) Appl. Phys. Lett. , vol.57 , pp. 1046-1048
    • Canham, L.T.1
  • 7
    • 37149016972 scopus 로고    scopus 로고
    • Coupling of surface waves in highly defined one-dimensional porous silicon photonic crystals for gas sensing applications
    • DOI 10.1063/1.2824387
    • E. Descrovi F. Frascella B. Sciacca F. Geobaldo L. Dominici F. Michelotti 2007 Coupling of surface waves in highly defined one-dimensional porous silicon photonic crystals for gas sensing applications Appl. Phys. Lett. 91 241109 241111 10.1063/1.2824387 2007ApPhL..91x1109D (Pubitemid 350261978)
    • (2007) Applied Physics Letters , vol.91 , Issue.24 , pp. 241109
    • Descrovi, E.1    Frascella, F.2    Sciacca, B.3    Geobaldo, F.4    Dominici, L.5    Michelotti, F.6
  • 9
    • 42949167688 scopus 로고    scopus 로고
    • Development of simulation tools to study optical properties of one-dimensional photonic crystals
    • DOI 10.1163/156939308784159408
    • R.S. Dubey D.K. Gautam 2008 Development of simulation tools to study optical proprieties of one-dimensional photonic crystal J. Electromagn. Waves Appl. 22 5-6 849 860 10.1163/156939308784159408 (Pubitemid 351612546)
    • (2008) Journal of Electromagnetic Waves and Applications , vol.22 , Issue.5-6 , pp. 849-860
    • Dubey, R.S.1    Gautam, D.K.2
  • 10
    • 0023595982 scopus 로고
    • Drift velocity and ionization coefficient for holes in single-valley semiconductors
    • 10.1016/0038-1101(87)90051-7 1987SSEle.30.1271G
    • D.K. Gautam W.S. Khokle 1987 Drift velocity and ionization coefficient for holes in single-valley semiconductors Solid-State Elect. 30 12 1271 1275 10.1016/0038-1101(87)90051-7 1987SSEle..30.1271G
    • (1987) Solid-State Elect. , vol.30 , Issue.12 , pp. 1271-1275
    • Gautam, D.K.1    Khokle, W.S.2
  • 11
    • 0023963319 scopus 로고
    • Photon emission from reverse-biased silicon P-N junctions
    • 10.1016/0038-1101(88)90130-X 1988SSEle.31.219G
    • D.K. Gautam W.S. Khokle K.B. Garg 1988 Photon emission from reverse-biased silicon P-N junctions Solid-State Elect. 31 2 219 222 10.1016/0038-1101(88)90130-X 1988SSEle..31..219G
    • (1988) Solid-State Elect. , vol.31 , Issue.2 , pp. 219-222
    • Gautam, D.K.1    Khokle, W.S.2    Garg, K.B.3
  • 12
    • 0030126946 scopus 로고    scopus 로고
    • Pulsed anodic etching: An effective method of preparing light-emitting porous silicon
    • DOI 10.1063/1.115845, PII S000369519600417X
    • H. Hou H. Xu F. Zhange M. Li M. Yu 1996 An effective method of preparing light-emitting porous silicon Appl. Phys. Lett. 68 17 2323 2325 10.1063/1.115845 1996ApPhL..68.2323H (Pubitemid 126683796)
    • (1996) Applied Physics Letters , vol.68 , Issue.17 , pp. 2323-2325
    • Hou, X.-Y.1    Fan, H.-L.2    Xu, L.3    Zhang, F.-L.4    Li, M.-Q.5    Yu, M.-R.6    Wang, X.7
  • 13
    • 26544437684 scopus 로고
    • Strong localization of photons in certain disordered dielectric superlattices
    • 10.1103/PhysRevLett.58.2486 1987PhRvL.58.2486J
    • S. John 1987 Strong localization of photons in certain disordered dielectric superlattices Phys. Rev. Lett. 58 2486 2849 10.1103/PhysRevLett.58. 2486 1987PhRvL..58.2486J
    • (1987) Phys. Rev. Lett. , vol.58 , pp. 2486-2849
    • John, S.1
  • 14
    • 3242743715 scopus 로고    scopus 로고
    • Possibility of fabricating light-emitting porous silicon from gas phase etchants
    • 10.1364/OE.6.000007 2000OExpr.6.7K
    • S. Kalem O. Yavuzcein 1999 Possibility of fabricating light-emitting porous silicon from gas phase etchants Opt. Exp. 6 1 7 11 10.1364/OE.6.000007 2000OExpr...6....7K
    • (1999) Opt. Exp. , vol.6 , Issue.1 , pp. 7-11
    • Kalem, S.1    Yavuzcein, O.2
  • 15
    • 36448999812 scopus 로고
    • Spatially resolved Raman measurements at electroluminescent porous n-silicon
    • 10.1063/1.351979 1992JAP.72.5401K
    • F. Kozlowski W. Lang 1992 Spatially resolved Raman measurements at electroluminescent porous n-silicon J. Appl. Phys. 72 1 5401 10.1063/1.351979 1992JAP....72.5401K
    • (1992) J. Appl. Phys. , vol.72 , Issue.1 , pp. 5401
    • Kozlowski, F.1    Lang, W.2
  • 16
    • 0027697474 scopus 로고
    • Porous silicon electroluminescent devices
    • 10.1016/0022-2313(93)90152-D
    • W. Lang P. Steinger F. Kozlowski 1993 Porous silicon electroluminescent devices J. Lumin. 57 341 349 10.1016/0022-2313(93)90152-D
    • (1993) J. Lumin. , vol.57 , pp. 341-349
    • Lang, W.1    Steinger, P.2    Kozlowski, F.3
  • 17
    • 59749106053 scopus 로고    scopus 로고
    • Micro-porous silicon structure with low optical reflection
    • doi: 10.1007/s10854-008-9724-z
    • Lin, C.W., Chen, Y.L., Lee, Y.S.: Micro-porous silicon structure with low optical reflection J. Mater. Sci.: Mater. Electron. (2008). doi: 10.1007/s10854-008-9724-z
    • (2008) J. Mater. Sci.: Mater. Electron.
    • Lin, C.W.1    Chen, Y.L.2    Lee, Y.S.3
  • 19
    • 0037091665 scopus 로고    scopus 로고
    • Porous silicon multilayer structures: A photonic band gap analysis
    • DOI 10.1063/1.1461898
    • J.E. Lugo H.A. Lopez S. Chan P.M. Fauchet 2002 Porous silicon multilayer structures: a photonic band gap analysis J. Appl. Phys. 91 8 4966 4972 10.1063/1.1461898 2002JAP....91.4966L (Pubitemid 34598955)
    • (2002) Journal of Applied Physics , vol.91 , Issue.8 , pp. 4966
    • Lugo, J.E.1    Lopez, H.A.2    Chan, S.3    Fauchet, P.M.4
  • 20
    • 34248352178 scopus 로고    scopus 로고
    • Periodic versus aperiodic: Enhancing the sensitivity of porous silicon based optical sensors
    • DOI 10.1063/1.2737391
    • L. Moretti I. Rea L. De Stefano I. Rendina 2007 Periodic versus aperiodic: enhancing the sensitivity of porous silicon based optical sensors Appl. Phys. Lett. 90 191112 10.1063/1.2737391 2007ApPhL..90s1112M (Pubitemid 46738068)
    • (2007) Applied Physics Letters , vol.90 , Issue.19 , pp. 191112
    • Moretti, L.1    Rea, I.2    De Stefano, L.3    Rendina, I.4
  • 21
    • 33646185060 scopus 로고    scopus 로고
    • Quantitative analysis of the sensitivity of porous silicon optical biosensors
    • 10.1063/1.2196069 2006ApPhL.88p3108O
    • H. Ouyang C. Striemer Christopher M. Fauchet Philippe 2006 Quantitative analysis of the sensitivity of porous silicon optical biosensors Appl. Phys. Lett. 88 163108 163110 10.1063/1.2196069 2006ApPhL..88p3108O
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 163108-163110
    • Ouyang, H.1    Striemer Christopher, C.2    Fauchet Philippe, M.3
  • 22
    • 0030545446 scopus 로고    scopus 로고
    • Porous silicon: Silicon quantum dots for photonic applications
    • L. Pavesi R. Guardini 1996 Porous silicon: silicon quantum dots for photonic applications Brazl. J. Phys. 26 1 152 169
    • (1996) Brazl. J. Phys. , vol.26 , Issue.1 , pp. 152-169
    • Pavesi, L.1    Guardini, R.2
  • 24
    • 75049085188 scopus 로고    scopus 로고
    • Nanostructured porous silicon as functionalized material for biosensor application
    • doi: 10.1007/s10856-008-3509-z
    • Singh, S., Sharma, S.N., Shivaprasad, G.S.M., Mohan, L., Khan, M.A.: Nanostructured porous silicon as functionalized material for biosensor application. J. Mater. Sci.: Mater. (2008). doi: 10.1007/s10856-008-3509-z
    • (2008) J. Mater. Sci.: Mater.
    • Singh, S.1    Sharma, S.N.2    Shivaprasad, G.S.M.3    Mohan, L.4    Khan, M.A.5
  • 25
    • 0026865985 scopus 로고
    • Photovoltaic response in electrochemically prepared photoluminescent porous silicon
    • 10.1016/0927-0248(92)90047-S
    • G. Smestad M. Kunst C. Vial 1992 Photovoltaic response in electrochemically prepared photoluminescent porous silicon Solar Energy Mater. Solar Cells 26 277 283 10.1016/0927-0248(92)90047-S
    • (1992) Solar Energy Mater. Solar Cells , vol.26 , pp. 277-283
    • Smestad, G.1    Kunst, M.2    Vial, C.3
  • 26
    • 21544477516 scopus 로고
    • Raman analysis of light-emitting porous silicon
    • 10.1063/1.107097 1992ApPhL.60.2086S
    • Z. Sui P. Leong Patrick P. Herman Irving 1992 Raman analysis of light-emitting porous silicon Appl. Phys. Lett. 60 17 2086 2088 10.1063/1.107097 1992ApPhL..60.2086S
    • (1992) Appl. Phys. Lett. , vol.60 , Issue.17 , pp. 2086-2088
    • Sui, Z.1    Leong Patrick, P.2    Herman Irving, P.3
  • 28
    • 36448999944 scopus 로고
    • Visible photoluminescence from porous silicon: A quantum confinement effect mainly due to holes?
    • 10.1063/1.107598 1992ApPhL.61.1213V
    • M. Voos P. Uzan C. Delalande G. Bastard 1992 Visible photoluminescence from porous silicon: a quantum confinement effect mainly due to holes? Appl. Phys. Lett. 61 10 1213 1215 10.1063/1.107598 1992ApPhL..61.1213V
    • (1992) Appl. Phys. Lett. , vol.61 , Issue.10 , pp. 1213-1215
    • Voos, M.1    Uzan, P.2    Delalande, C.3    Bastard, G.4
  • 29
    • 36449007938 scopus 로고
    • Luminescence studies on porous silicon
    • 10.1063/1.110388 1993ApPhL.63.168W
    • Y.M. Weng Z.N. Fan X.F. Zong 1993 Luminescence studies on porous silicon Appl. Phys. Lett. 63 2 168 170 10.1063/1.110388 1993ApPhL..63..168W
    • (1993) Appl. Phys. Lett. , vol.63 , Issue.2 , pp. 168-170
    • Weng, Y.M.1    Fan, Z.N.2    Zong, X.F.3
  • 30
    • 33745947692 scopus 로고
    • Inhibited spontaneous emission in solid-state physics and electronics
    • 10.1103/PhysRevLett.58.2059 1987PhRvL.58.2059Y
    • E. Yablonovitch 1987 Inhibited spontaneous emission in solid-state physics and electronics Phys. Rev. Lett. 58 2059 2062 10.1103/PhysRevLett.58. 2059 1987PhRvL..58.2059Y
    • (1987) Phys. Rev. Lett. , vol.58 , pp. 2059-2062
    • Yablonovitch, E.1
  • 31
    • 30544450352 scopus 로고    scopus 로고
    • Influence of polarized bias and porous silicon morphology on the electrical behavior of Au-porous silicon contacts
    • Z. Yeo L. Dong-sheng X. Shou-xiang Y. De-ren J. Min-hua 2005 Influence of polarized bias and porous silicon morphology on the electrical behavior of Au-porous silicon contacts J. Zhejiang Univ. SCI. 6B 11 1135 1319
    • (2005) J. Zhejiang Univ. SCI. 6B , vol.11 , pp. 1135-1319
    • Yeo, Z.1    Dong-Sheng, L.2    Shou-Xiang, X.3    De-Ren, Y.4    Min-Hua, J.5
  • 32
    • 33748289949 scopus 로고    scopus 로고
    • Al-assisted anodic etched porous silicon
    • DOI 10.1007/s10853-006-0267-5
    • Y. Zhao D. Li D. Yang 2006 Al-assisted anodic etched porous silicon J. Mater. Sci. 41 5283 5286 10.1007/s10853-006-0267-5 2006JMatS..41.5283Z (Pubitemid 44326825)
    • (2006) Journal of Materials Science , vol.41 , Issue.16 , pp. 5283-5286
    • Zhao, Y.1    Li, D.2    Yang, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.