Micro-porous silicon structure with low optical reflection

Journal of Materials Science: Materials in Electronics

Volumn 20, Issue 4, 2009, Pages 301-304

  Lin, Chiung Wei ^a   Chen, Yi Liang ^a   Lee, Yeong Shyang ^b  

^a TATUNG UNIVERSITY   (Taiwan)

^b AU OPTRONICS CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON FILMS; COMPLEX MORPHOLOGIES; ETCHING PROCESS; FINE GRAINS; NOVEL METHODS; OPTICAL CHARACTERISTICS; OPTICAL REFLECTIONS; POROUS SILICON STRUCTURES; SELECTIVE ETCHINGS;

ETCHING; GRAIN BOUNDARIES; LIGHT REFLECTION; NONMETALS; OPTICAL SENSORS; POROUS SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

AMORPHOUS SILICON;

EID: 59749106053     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-008-9724-z     Document Type: Article

References (15)

1. W.J. Lee, J.H. Lee, U. Gangopadhyay, I.O. Parm, K. Chakrabarty, K. Kim, J. Yi, Tech. Dig. 29th Int. Photovoltaic Specialists Conf. 296 (2002)
2. S.H. Zaidi, D.S. Ruby, J.M. Gee, IEEE Trans. Elect. Dev. 48, 1200 (2001). doi: 10.1109/16.925248
3. H.G. Craighead, R.E. Howard, D.M. Tennant, Appl. Phys. Lett. 37, 653 (1980). doi: 10.1063/1.92015
4. J.I. Gittleman, E.K. Sichel, H.W. Lehmann, R. Widmer, Appl. Phys. Lett. 35, 742 (1979). doi: 10.1063/1.90953
5. E. Manea, E. Budianu, M. Purica, F. Babarada, I. Cernica, V. Moagar-Poladian, Tech. Dig. Int. Semiconductor. Conf. 1, 225 (2004)
6. A. Hauser, I. Melnyk, P. Fath, S. Narayanan, S. Roberts, T.M. Bruton, Tech. Dig. 3rd Int. Photovoltaic Energy Convers. World Conf. 2, 1447 (2003)
7. O. Schultz, G. Emanuel, W. Glunz, G.P. Willeke, Tech. Dig. 3rd Int. Photovoltaic Energy Convers. World Conf. 2, 1360 (2003)
8. P.N. Vinod, M. Lal, Tech. Dig. 31st Int. Photovoltaic Special. Conf. 1135 (2005)
9. C.C. Striemer, F. Shi, P.M. Fauchet, S.P. Duttagupta, Tech. Dig. 28th Int. Photovoltaic Special. Conf. 932 (2000)
10. R. Einhaus, E. Vazsonyi, J. Szlufcik, J. Nijs, R. Mertens, Tech. Dig. 26th Int. Solar Cell Manuf. Conf. 167 (1997)
11. E.S. Marstein, H.J. Solheim, D.N. Wright, A. Holt, Tech. Dig. 31st Int. Photovoltaic Special. Conf. 1309 (2005)
12. Y.S. Tsuo, Y. Xiao, M.J. Heben, X. Wu, F.J. Pern, S.K. Deb, Tech. Dig. 23th Int. Photovoltaic Special. Conf. 287 (1993)
13. W.N. Huang, K.Y. Tong, P.W. Chan,Tech. Dig. Int. Electron. Dev. Meet., Hong Kong 21 (1996)
14. P. Guyader, P. Joubert, M. Guendouz, C. Beau, M. Sarret, Appl. Phys. Lett. 65, 1787 (1994). doi: 10.1063/1.112869
15. J.A. Mazer, SOLAR CELL: An Introduction to Crystalline Photovoltaic Technology (Kluwer Acadmic, Norwell, 1997), p. 103