Al-assisted anodic etched porous silicon

Journal of Materials Science

Volumn 41, Issue 16, 2006, Pages 5283-5286

  Zhao, Yue ^a   Li, Dongsheng ^a   Yang, Deren ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NEGATIVE IONS; PHOTOLUMINESCENCE; SILICON WAFERS;

ANODIC ETCHING; STRUCTURAL CONFIGURATION;

POROUS SILICON;

EID: 33748289949     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-006-0267-5     Document Type: Conference Paper

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