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Volumn , Issue , 2009, Pages 523-526

Integration of self-assembled inductors with CMOS LC oscillators

Author keywords

Integrated inductors; MEMS; RF oscillators

Indexed keywords

CMOS COMPATIBILITY; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; FREQUENCY OFFSETS; HIGH-Q INDUCTORS; IN-PLANE; INTEGRATED INDUCTORS; LC-OSCILLATORS; MONOLITHIC INTEGRATION; OSCILLATION FREQUENCY; OUT-OF-PLANE; POST-CMOS; QUALITY FACTORS; RADIO FREQUENCY APPLICATIONS; RF OSCILLATOR; RF SYSTEM; SELF ASSEMBLY PROCESS; SELF-ASSEMBLED INDUCTORS; SURFACE TENSION FORCE;

EID: 72449184460     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (11)
  • 2
    • 16544382979 scopus 로고    scopus 로고
    • Review of radio frequency microelectromechanical systems technology
    • Mar
    • S. Lucyszyn, "Review of radio frequency microelectromechanical systems technology," Proceedings of IEE Science, Measurement and Technology, vol. 151, no. 2, pp. 93-103, Mar. 2004.
    • (2004) Proceedings of IEE Science, Measurement and Technology , vol.151 , Issue.2 , pp. 93-103
    • Lucyszyn, S.1
  • 3
    • 17944394356 scopus 로고    scopus 로고
    • Fabrication, RF characteristics and mechanical stability of self-assembled 3D microwave inductors
    • G. W. Dahlmann, E. M. Yeatman, P. Young, I. D. Robertson, and S. Lucyszyn, "Fabrication, RF characteristics and mechanical stability of self-assembled 3D microwave inductors," Sensors and Actuators A: Physical, vol. 97-98, pp. 215-220, 2002.
    • (2002) Sensors and Actuators A: Physical , vol.97-98 , pp. 215-220
    • Dahlmann, G.W.1    Yeatman, E.M.2    Young, P.3    Robertson, I.D.4    Lucyszyn, S.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.