Electrodeposition of Au for self-assembling 3D micro-structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6882, Issue , 2008, Pages

  Kiziroglou, M E ^a   Mukherjee, A Goswami ^a   Moseley, R W ^b   Taylor, P ^c   Pranonsatit, S ^a   Holmes, A S ^a,b   Yeatman, E M ^a,b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b Microsaic Systems Ltd   (United Kingdom)

^c Semefab Ltd   (United Kingdom)

Author keywords

3D; Inductors; MEMS; Self assembly

Indexed keywords

COPPER; MEMS; MICROSTRUCTURE; OXIDATION; SELF ASSEMBLY; THREE DIMENSIONAL;

HINGE REFLOW; MELTABLE HINGES; SELF-RESONANCE FREQUENCY;

ELECTRIC INDUCTORS;

EID: 41149091618     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.763341     Document Type: Conference Paper

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