Design and simulation of on-line test structure for thermal conductivity of polysilicon thin films

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 25, Issue 4, 2004, Pages 430-435

  Xu, Gaobin ^a   Huang, Qing'an ^a  

^a Southeast University   (China)

Author keywords

Polysilicon thin films; Surface micromachining technique; Test structure; Thermal conductivity

Indexed keywords

FINITE ELEMENT METHOD; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; ONLINE SYSTEMS; POLYSILICON; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY;

ONLINE TESTING; POLYSILICON THIN FILMS; SURFACE MICROMACHINING; TEST STRUCTURE;

THIN FILMS;

EID: 7244260531     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

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