Microfabrication and laser diagnosis of pressure-swirl atomizers

Journal of Microelectromechanical Systems

Volumn 13, Issue 5, 2004, Pages 843-850

  Yang, Jing Tang ^a   Huang, Ker Jer ^a   Chen, Alex C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZERS; ELECTROPLATING; INDUCTIVELY COUPLED PLASMA; INJECTION MOLDING; LASER DIAGNOSTICS; NANOTECHNOLOGY; PARTICLE SIZE ANALYSIS; PLASMA ETCHING;

LASER DIAGNOSIS; MICROFABRICATION; PHASE DOPPLER PARTICLE ANALYZER; PRESSURE SWIRL ATOMIZERS;

MICROELECTROMECHANICAL DEVICES;

EID: 7244254667     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.833236     Document Type: Article

References (17)

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