Noncontact self-running ultrasonically levitated two-dimensional stage using flexural standing waves

Japanese Journal of Applied Physics

Volumn 48, Issue 7 PART 2, 2009, Pages

  Koyama, Daisuke ^a   Nakamura, Kentaro ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM PLATES; FIXED ENDS; FLEXURAL VIBRATION MODES; MAXIMUM THRUST; NEGATIVE X; NON-CONTACT; PZT; STANDING WAVE; VIBRATING PLATE; ZIRCONATE TITANATE;

PIEZOELECTRIC TRANSDUCERS; TWO DIMENSIONAL; VIBRATING CONVEYORS;

ULTRASONICS;

EID: 72049097671     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.07GM07     Document Type: Article

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