An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 3, 2007, Pages 597-604

  Koyama, Daisuke ^b   Ide, Takeshi ^b   Friend, James R ^a,b   Nakamura, Kentaro ^b   Ueha, Sadayuki ^b  

^a IEEE

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; CERAMIC PRODUCTS; RADIATION EFFECTS; RESONANCE; TRANSDUCERS; VIBRATIONS (MECHANICAL);

ACOUSTIC RADIATION FORCE; GUIDE RAILS; TRAVELING VIBRATIONS; ULTRASONIC LEVITATION;

ULTRASONICS;

ARTICLE; CERAMICS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MECHANICAL STRESS; METHODOLOGY; MICROMANIPULATION; THEORETICAL MODEL; ULTRASOUND; VIBRATION;

CERAMICS; COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICROMANIPULATION; MODELS, THEORETICAL; STRESS, MECHANICAL; ULTRASONICS; VIBRATION;

EID: 33947625577     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.282     Document Type: Article

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