A stator for a self-running, ultrasonically-levitated sliding stage

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 11, 2007, Pages 2337-2343

  Koyama, Daisuke ^a   Nakamura, Kentaro ^a   Ueha, Sadayuki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ARRAYS; ALUMINUM BEAMS AND GIRDERS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; PIEZOELECTRIC MATERIALS; SUBSTRATES; TRANSDUCERS;

FLEXURAL STANDING WAVE; PHASE DIFFERENCE; ULTRASONICALLYLEVITATED SLIDING;

ULTRASONICS;

EID: 37148998825     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.538     Document Type: Article

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