A self-running standing wave-type bidirectional slider for the ultrasonically levitated thin linear stage

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 55, Issue 8, 2008, Pages 1823-1830

  Koyama, Daisuke ^a,b   Takei, Hiroyuki ^b   Nakamura, Kentaro ^a,b   Ueha, Sadayuki ^b  

^a IEEE

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSIONS; ACOUSTIC RADIATORS; ACOUSTIC STREAMING; ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE TRANSMISSION; ACOUSTIC WAVES; ALUMINA; ELASTIC WAVES; FIBER OPTICS; GALLIUM ALLOYS; LATTICE VIBRATIONS; LIGHT METALS; MANGANESE ALLOYS; MANGANESE COMPOUNDS; PIEZOELECTRIC TRANSDUCERS; PRESSURE DISTRIBUTION; STANDING WAVE METERS; TEMPERATURE CONTROL; ULTRASONICS; VIBRATIONS (MECHANICAL); WAVES;

ACOUSTIC RADIATION FORCES; AIR GAPS; ASYMMETRIC VIBRATIONS; DRIVING FORCES; ELEMENTAL ANALYSIS; FIBER-OPTIC PROBES; LINEAR STAGES; SOUND PRESSURE DISTRIBUTION; STANDING WAVE; VIBRATING PLATES; VIBRATION MODES; ZIRCONATE TITANATE;

ACOUSTICS;

ACOUSTICS; ARTICLE; COMPUTER AIDED DESIGN; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; TRANSDUCER; ULTRASOUND; VIBRATION;

ACOUSTICS; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; SONICATION; TRANSDUCERS; VIBRATION;

EID: 49449111928     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2008.865     Document Type: Article

References (22)

1. G. Obinata, S. Mori, T. Hoshino, and K. Ouchi, "Air-bearing linear actuator for highly precise tracking," IEEE Trans. Magn., vol. 39, no. 2, pp. 812-818, 2003.
2. S. Lee, O. Kim, and D. Han, "Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing," IEEE Trans. Ind. Electron., vol. 50, no. 2, pp. 374-378, 2003.
3. T. Ide, J. R. Friend, K. Nakamura, and S. Ueha, "A low-profile design for the noncontact ultrasonically levitated stage," Jpn. J. Appl. Phys., vol. 44, no. 6B, pp. 4662-4665, 2005.
4. D. Koyama, T. Ide, J. R. Friend, K. Nakamura, and S. Ueha, "An ultrasonically levitated non-contact stage using traveling vibrations on precision ceramic guide rails," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 3, pp. 597-604, 2007.
5. D. Koyama, K. Nakamura, and S. Ueha, "A stator for a self-running, ultrasonically-levitated sliding stage," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 11, pp. 2337-2343, 2007.
6. T. Yamazaki, J. Hu, K. Nakamura, and S. Ueha, "Trial construction of a noncontact ultrasonic motor with an ultrasonically levitated rotor," Jpn. J. Appl. Phys., vol. 35, no. 5B, pp. 3286-3288, 1996.
7. T. Amano, Y. Koike, K. Nakamura, S. Ueha, and Y. Hashimoto, "A multi-transducer near field acoustic levitation system for noncontact transportation of large-sized planar objects," Jpn. J. Appl. Phys., vol. 39, no. 5B, pp. 2982-2985, 2000.
8. A. Minikes and I. Bucher, "Levitation force induced by pressure radiation in gas squeeze films," J. Acoust. Soc. Amer., vol. 116, no. 1, pp. 217-226, 2004.
9. E. Matsuo, Y. Koike, K. Nakamura, S. Ueha, and Y. Hashimoto, "Holding characteristics of planar objects suspended by near-field acoustic levitation," Ultrasonics, vol. 38, no. 1-8, pp. 60-63, 2000.
10. J. Hu, K. Nakamura, and S. Ueha, "Stability analysis of an acoustically levitated disk," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, no. 2, pp. 117-127, 2003.
11. Y. Hashimoto, Y. Koike, and S. Ueha, "Transporting objects without contact using flexural traveling waves," J. Acoust. Soc. Amer., vol. 103, no. 6, pp. 3230-3233, 1998.
12. S. Ueha, Y. Hashimoto, and Y. Koike, "Non-contact transportation using near-field acoustic levitation," Ultrasonics, vol. 38, no. 1-8, pp. 26-32, 2000.
13. J. Saito, J. R. Friend, K. Nakamura, and S. Ueha, "Resonant mode design for noncontact ultrasonic motor with levitated rotor," Jpn. J. Appl. Phys., vol. 44, no. 6B, pp. 4666-4668, 2005.
14. J. Friend, Y. Gouda, K. Nakamura, and S. Ueha, "A simple bidirectional linear microactuator for nanopositioning - The 'Baltan' microactuator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, no. 6, pp. 1160-1168, 2006.
15. W. L. Nyborg, "Acoustic streaming due to attenuated plane waves," J. Acoust. Soc. Amer., vol. 25, no. 1, pp. 68-75, 1953.
16. O. V. Rudenko and S. I. Soluyan, "Acoustic streaming," in Theoretical Foundations of Nonlinear Acoustics. New York: Consultants Bureau, 1977.
17. A. Minikes and I. Bucher, "Noncontacting lateral transportation using gas squeeze film generated by flexural traveling waves-Numerical analysis," J. Acoust. Soc. Amer., vol. 113, no. 5, pp. 2464-2473, 2003.
18. W. L. Nyborg, "Acoustic streaming near a bounday," J. Acoust. Soc. Amer., vol. 30, pp. 329-339, 1958.
19. C. Lee and T. Wang, "Near-boundary streaming around a small sphere due to two orthogonal standing waves," J. Acoust. Soc. Amer., vol. 85, no. 3, pp. 1081-1088, 1989.
20. H. Takei, T. Hasegawa, K. Nakamura, and S. Ueha, "Measurement of intense ultrasound field in air using fiber optic probe," Jpn. J. Appl. Phys., vol. 46, no. 7B, pp. 4555-4557, 2007.
21. B. Chu and E. Apfel, "Acoustic radiation pressure produced by a beam of sound," J. Acoust. Soc. Amer., vol. 72, no. 6, pp. 1673-1687, 1982.
22. C. Lee and T. Wang, "Acoustic radiation pressure," J. Acoust. Soc. Amer., vol. 94, no. 2, pp. 1099-1109, 1993.