Simulation of a multilayer structure in coatings prepared by magnetron sputtering

Surface and Coatings Technology

Volumn 204, Issue 6-7, 2009, Pages 850-853

  Panjan, M ^a   Peterman, T ^b   Cekada M ^a   Panjan, P ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Computer simulation; Layer thickness; Magnetron sputtering; Multilayer coatings; Multilayer structure; TEM

Indexed keywords

COMPLICATED GEOMETRY; DEPOSITION SYSTEMS; GEOMETRICAL PARAMETERS; INITIAL POSITION; LAYER THICKNESS; MULTI-LAYER-COATING; MULTILAYER STRUCTURES; PLANETARY ROTATION; PVD COATINGS; ROTATIONAL AXES; TEM; UNIFORM COATING;

COATINGS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; GEOMETRY; MAGNETRONS; MULTILAYERS; ROTATION; TOOLS; TRANSMISSION ELECTRON MICROSCOPY;

SUBSTRATES;

EID: 71849116488     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.08.026     Document Type: Article

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