Sputtering simulation of multilayer coatings in industrial PVD system with three-fold rotation

Vacuum

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 158-161

  Panjan, M ^a   Cekada M ^a   Panjan, P ^a   Zalar, A ^a   Peterman, T ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Multilayers; Simulation; Sputtering

Indexed keywords

COMPUTATION THEORY; COMPUTER SIMULATION; PHYSICAL VAPOR DEPOSITION; SPUTTERING; SUBSTRATES;

MULTILAYER COATING; THREE-FOLD ROTATION;

MULTILAYERS;

EID: 35248838743     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.053     Document Type: Article

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