SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 207-211

Multilayer hard coatings by coordinated substrate rotation modes in industrial PVD deposition systems

(3) Rother, B a Jehn, H A a Gabriel, H M b

a Depart of Electrochemistry Research Institute for Precious Metals and Metal Chemistry Fem (Germany)

b PVTGmbH (Germany)

Author keywords

(Ti,Al)C,N coatings; Deposition process; Substrate rotation; Tribological coatings

Indexed keywords

CHARACTERIZATION; DEPOSITION; FILM GROWTH; MATERIALS TESTING; MATHEMATICAL MODELS; MULTILAYERS; OPTICAL MICROSCOPY; PHYSICAL PROPERTIES; TRIBOLOGY;

CATHODIC ARC PROCESS; DEPTH SENSING INDENTATION MEASUREMENT; MULTILAYER HARD COATINGS; PHYSICAL VAPOR DEPOSITION; ROCKWELL INDENTATION TEST; SUBSTRATE ROTATION; TRIBOLOGICAL COATINGS;

PROTECTIVE COATINGS;

EID: 0030384074 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(96)02986-6 Document Type: Article

Times cited : (24)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.