Capacitive sensor arrays with controllable deposition of the sensing polymer area for VOCs applications: Design and measurement considerations

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 176-179

  Manoli, K ^a,b   Goustouridis, D ^a   Oikonomou, P ^a   Chatzandroulis, S ^a   Sanopoulou, M ^b   Raptis, I ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b Institute of Physical Chemistry   (Greece)

Author keywords

capacitive sensor; gas sensor; interdigitated electrodes; polymer

Indexed keywords

ANALYTES; CAPACITIVE SENSOR; CONVENTIONAL MICROELECTRONICS; CRITICAL DIMENSION; DROP CASTING; GAS SENSORS; INTER-DIGITATED ELECTRODES; MEASUREMENT FREQUENCY; MICROMACHINING TECHNOLOGIES; POLYMERIC COATINGS; QUARTZ SUBSTRATE; SENSING AREAS; SENSING PERFORMANCE;

CHEMICAL SENSORS; ELECTRODES; GAS DETECTORS; MICROELECTRONICS; OXIDE MINERALS; PHOTORESISTS; PLASTIC COATINGS; QUARTZ; SENSOR ARRAYS; SIGNAL PROCESSING; STANDBY POWER SYSTEMS;

POLYMERS;

EID: 71849114033     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.044     Document Type: Conference Paper

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