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Volumn 204, Issue 6-7, 2009, Pages 907-910
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The effects of composition and pulsed biasing on chromium nitride films
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Author keywords
Chrome; Nitride
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Indexed keywords
CHROME;
CHROMIUM NITRIDE;
CHROMIUM NITRIDE COATINGS;
CHROMIUM NITRIDE FILMS;
FILM PROPERTIES;
INDUSTRY STANDARDS;
ION CURRENTS;
ION ETCHING;
MID-FREQUENCY;
NITROGEN GAS FLOW;
PROCESS PARAMETERS;
PULSED BIASING;
SCRATCH ADHESION TESTING;
SEM;
STABLE FORM;
STRUCTURE AND PROPERTIES;
TARGET VOLTAGE;
TRIBOLOGICAL PROPERTIES;
WEAR-RESISTANT;
XRD;
AERODYNAMICS;
BORIDE COATINGS;
CHROMIUM;
FLOW OF GASES;
HARD COATINGS;
PLASMAS;
NITRIDES;
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EID: 71849097862
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.05.049 Document Type: Article |
Times cited : (27)
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References (11)
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