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Volumn 204, Issue 6-7, 2009, Pages 907-910

The effects of composition and pulsed biasing on chromium nitride films

Author keywords

Chrome; Nitride

Indexed keywords

CHROME; CHROMIUM NITRIDE; CHROMIUM NITRIDE COATINGS; CHROMIUM NITRIDE FILMS; FILM PROPERTIES; INDUSTRY STANDARDS; ION CURRENTS; ION ETCHING; MID-FREQUENCY; NITROGEN GAS FLOW; PROCESS PARAMETERS; PULSED BIASING; SCRATCH ADHESION TESTING; SEM; STABLE FORM; STRUCTURE AND PROPERTIES; TARGET VOLTAGE; TRIBOLOGICAL PROPERTIES; WEAR-RESISTANT; XRD;

EID: 71849097862     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.05.049     Document Type: Article
Times cited : (27)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.