A 3D-RBS study of irradiation-induced deformation and masking properties of ordered colloidal nanoparticulate masks

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 1, 2010, Pages 79-86

  Zolnai, Z ^a   Deak A ^a   Nagy, N ^a   Toth A L ^a   Kotai E ^b   Battistig, G ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

3D RBS; Anisotropic deformation; Ion irradiation; Nanosphere lithography

Indexed keywords

ANISOTROPIC DEFORMATION; COLLOIDAL SILICA; DATA ANALYSIS; DEPTH DISTRIBUTION; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; FLUENCES; GEOMETRICAL TRANSFORMATION; HOLE SIZE; ION IRRADIATION; MASKING PROPERTIES; MEASUREMENT GEOMETRY; NANO PARTICULATES; NANO SPHERE LITHOGRAPHY; NANOPARTICLE INTERACTION; POLYGONAL SHAPES; RUTHERFORD BACKSCATTERING SPECTROMETRY; SI SUBSTRATES; SPECTRUM SIMULATION; SUBMICRON-SIZED; THREE-DIMENSIONAL (3D); THREE-DIMENSIONAL STRUCTURE;

ANISOTROPY; DEFORMATION; ELECTRON ENERGY LEVELS; FIELD EMISSION; FIELD EMISSION MICROSCOPES; HELIUM; IONS; IRRADIATION; MONOLAYERS; NANOSPHERES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICA; XENON;

THREE DIMENSIONAL;

EID: 71649110405     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.09.039     Document Type: Article

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