A low-cost integrated micro system for flow velocity and direction measurement

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 276-279

  Liu, P ^a   Zhu, R ^a   Liu, X D ^a   Zhang, F X ^a   Zhou, Z Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Flexible substrate; Flow sensor system; Flow velocity and direction; Highly integrating; Low cost; Micromachining

Indexed keywords

DIRECTION MEASUREMENT; ELECTRONIC CIRCUITS; FLEXIBLE SUBSTRATE; FLOW SENSOR SYSTEM; FLOW-SENSORS; INTEGRATING SENSORS; MICROMACHINING PROCESS; PROCESSING CIRCUITS; SIGNAL PROCESSING CIRCUITS; THERMAL ELEMENTS; WIND TUNNEL EXPERIMENT;

ACTUATORS; COMPOSITE MICROMECHANICS; COSTS; ELECTRON TUBES; ELECTRONIC EQUIPMENT MANUFACTURE; FLOW VELOCITY; MICROMACHINING; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; POLYIMIDES; SIGNAL PROCESSING; SUBSTRATES; VELOCITY; WIND TUNNELS;

SOLID-STATE SENSORS;

EID: 71449107727     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285511     Document Type: Conference Paper

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