Frequency scaling and transducer efficiency in internal dielectrically transduced silicon bar resonators

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 708-711

  Weinstein, Dana ^a   Bhave, Sunil A ^a   Morita, Shinya ^b   Mitarai, Shun ^b   Ikeda, Koichi ^b  

^a Department of Obstetrics Gynecology   (United States)

^b SONY CORPORATION   (Japan)

Author keywords

Dielectric transduction; Resonator; RF MEMS

Indexed keywords

DIELECTRIC THICKNESS; FREQUENCY-SCALING; HALF-WAVE; MOTIONAL IMPEDANCE; MULTIPLE RESONATORS; RESONANT FREQUENCIES; RF-MEMS; SILICON BAR;

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; ACTUATORS; BACTERIOPHAGES; DIELECTRIC FILMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; POLYSILICON; RESONATORS;

SOLID-STATE SENSORS;

EID: 71449107457     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285422     Document Type: Conference Paper

References (6)

1. D. Weinstein, S.A. Bhave, "Internal dielectric transduction of a 4.5 GHz silicon bar resonator," IEEE International Electron Devices Meeting (IEDM 2007), pp. 415-418 (2007).
2. M. Ziaei-Moayyed, D. Elata, J. Hsieh, J.-W.P. Chen, E.P. Quevy, R.T. Howe, "Fully differential internal electrostatic transduction of a Lame-mode resonator," IEEE International Conference on Microelectro mechanical Systems (MEMS 2009), pp.931-934 (2009).
3. Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, C.T.-C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps," IEEE International Frequency Control Symposium 2005, pp.128-134 (2005).
4. D. Weinstein, S.A. Bhave, "Internal dielectric transduction: optimal position and frequency scaling," IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, 54(12), 2696-98 (2007).
5. A. Prak, M. Elwenspoek, J.H.J.Fluitman, "Selective mode excitation and detection of micromachined resonators," Journal of Microelectromechanical Systems 1(4), pp.179-186 (1992).
6. K.-L. Chen, H. Chandrahalim, A.B. Graham, S.A. Bhave, R.T. Howe, T.W. Kenny, "Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator," IEEE International Conference on Microelectromechanical Systems (MEMS 2009), pp.23-26 (2009).