High Q factor plate resonators for ultrasensitive mass sensing applications

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1630-1633

  Agache, V ^a   Cochet, M ^a   Blanc, R ^a   Baleras, F ^a   Caillat, P ^a  

^a CEA LETI   (France)

Author keywords

Mass sensor; Square disk plate resonator; Wine glass mode

Indexed keywords

BULK-MODE; DISK PLATE; ELECTROSTATIC COUPLING; HIGH Q FACTOR; MASS DETECTION; MASS RESOLUTION; MASS SENSING; MASS SENSOR; PLATE RESONATORS; QUALITY FACTORS; SINGLE CRYSTAL SILICON; ULTRASENSITIVE;

ACTUATORS; DISKS (STRUCTURAL COMPONENTS); GLASS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; Q FACTOR MEASUREMENT; RESONATORS; WINE;

SOLID-STATE SENSORS;

EID: 71449096603     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285772     Document Type: Conference Paper

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