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Volumn 3, Issue 5, 2009, Pages 145-147
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Large area mapping of the alloy composition of AlxGa 1-xN using infrared reflectivity
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Author keywords
[No Author keywords available]
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Indexed keywords
ALLOY COMPOSITIONS;
AREA MAPPING;
CALIBRATION PROCEDURE;
ENERGY POSITION;
INFRARED REFLECTIVITY;
LARGE-AREA WAFERS;
NON DESTRUCTIVE;
REFLECTANCE SPECTRUM;
SIC SUBSTRATES;
WURTZITES;
EPITAXIAL FILMS;
EPITAXIAL GROWTH;
REFLECTION;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON CARBIDE;
ZINC SULFIDE;
FORESTRY;
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EID: 71149116134
PISSN: 18626254
EISSN: 18626270
Source Type: Journal
DOI: 10.1002/pssr.200903113 Document Type: Article |
Times cited : (5)
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References (11)
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