Four-beam interference optical system for laser micro-structuring using picosecond laser

Journal of the Optical Society of Korea

Volumn 13, Issue 1, 2009, Pages 75-79

  Noh, Jiwhan ^a   Lee, Jaehoon ^a   Shin, Dongsig ^a   Sohn, Hyonkee ^a   Suh, Jeong ^a   Oh, Jeongseok ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

DOE(Diffractive Optical Element); Four beam interference; Laser ablation process; Mold surface micro pattern

Indexed keywords

EID: 70849117472     PISSN: 12264776     EISSN: None     Source Type: Journal    
DOI: 10.3807/JOSK.2009.13.1.075     Document Type: Article

References (16)

1. N. N. Nedialkov, S. E. Imamova, P. A. Atanasov, G. Heusel, D. Breitling, A. Ruf, H. Hügel, F. Dausinger, and P. Berger, "Laser ablation of iron by ultrashort laser pulses," Thin Solid Films 453-454, 496-500 (2004).
2. N. M, Bulgakova and Igor M. Bourakov, "Phase explosion under ultrashort pulsed laser blation: modeling with analysis of metastable state of melt," Applied Surface Science 197-198, 41-44 (2002).
3. K. R. Chen, J. N. Leboeuf, R. F. Wood, D. B. Geohegan, J. M. Donato, C. L. Liu, and A. A. Puretzky, "Laser-solid interaction and dynamics of laser-ablated materials," Applied Surface Science 96-98, 45-49 (1996).
4. I.-B. Sohn, Y.-C. Noh, Y.-S. Kim, D.-K. Ko, J. Lee, and Y.-J. Choi, "Laser ablation of polypropylene films using nanosecond, picosecond, and femtosecond laser," J. Opt. Soc. Korea 12, 38-41 (2008).
5. B. Wolff-Rottke, J. Ihlemann, H. Schmit, and A. Scholl, "Influence of the laser-spot diameter on photo-ablation rates," Appl. Phys. A 60, 13-17 (1995).
6. A. Yoshida, and T. Asakura, "Propagation and focusing of Gaussian laser beams beyond conventional diffraction limit," Opt. Comm. 123, 694-704 (1996).
7. T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, "Fabrication of three-dimensional periodic microstructures in photo resist SU-8 by phase-controlled holographic lithography," New journal of Physics 8, 250-257 (2006).
8. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multi photon fabrication of periodic structures by multi beam interference of femtosecond pulses," Appl. Phys. lett. 82, 28-35 (2003).
9. T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. lett. 79, 6-13 (2001).
10. H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, "Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8," Opt. Exp. 14, 7943-7953 (2006). (Pubitemid 44277529)
11. Y. Nakata, T. Okada, and M. Maeda, "Lithographical laser ablation using femtosecond laser," Appl. Phys. A 79, 2858-2865 (2004).
12. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996).
13. B. C. Choi, M. S. Lee, J.-H. Choi, and C. S. Park, "Application of micromachining in the PLC optical splitter packaging," J. Opt. Soc. Korea 7, 166-173 (2003).
14. T. Baldacchini, J. E. Carey, M. Zhou, and E. Mazur, "Super hydrophobic surfaces prepared by micro structuring of silicon using a femtosecond laser," Langmuir 22, 4917-4919 (2006).
15. M. T. Khorasani, H. Mirzadeh, and P. G. Sammes, "Laser induced surface modification of polydimethylsiloxane as a super-hydrophobic material," Radiat. Phys. Chem. 47, 881-888 (1996).
16. V. Zorba, L. Persano, D. Pisignano, A. Athanassiou, E. Stratakis, R. Cingolani, P. Tzanetakis, and C. Fotakis, "Making silicon hydrophobic: wettability control by two-length scale simultaneous pattering with femtosecond laser irradiation," Institute of physics publishing Nanotechnology 17, 3234-3238 (2006).