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Applied Physics A: Materials Science and Processing

Volumn 97, Issue 4, 2009, Pages 805-810

Zn-diffused LiNbO3 waveguides fabricated by DC magnetron sputtering

(5) Aghli Moghadam, L a Baghizadeh, A b Nabiyouni, G a Farashiani, A c Zendehnam, A a

a ARAK UNIVERSITY (Iran)

b NUCLEAR SCIENCE AND TECHNOLOGY RESEARCH INSTITUTE (Iran)

c IRAN TELECOMMUNICATION RESEARCH CENTER (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

COMPARATIVE ANALYSIS; DC MAGNETRON SPUTTERING; DOUBLE-BEAM; FABRICATION PROCEDURE; GOOD STABILITY; LITHIUM NIOBATE CRYSTAL; LOW-LOSS OPTICAL WAVEGUIDES; RBS ANALYSIS; SUBSTRATE TEMPERATURE; WAVEGUIDE FABRICATION PROCESS; XRD;

FABRICATION; INTEGRATED OPTOELECTRONICS; MAGNETRONS; NIOBIUM COMPOUNDS; OPTICAL PROPERTIES; OXIDATION; WAVEGUIDES;

ZINC;

EID: 70450237147 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-009-5345-5 Document Type: Article

Times cited : (6)

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