Sub-nanometer resolution for the inspection of reflective surfaces using white light

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7398, Issue , 2009, Pages

  Jüptner, Werner ^a   Bothe, Thorsten ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Freeform; Nanometer resolution; Reflectometry; Shape; Topometry; White light

Indexed keywords

COORDINATE MEASUREMENT MACHINES; DIAMOND TURNING; ENVIRONMENTAL DISTURBANCES; FAST METHODS; FREE-FORM SURFACE; FREEFORMS; FRINGE PATTERN; HIGH PRECISION; IMAGE PROCESSING SYSTEM; LOCAL CURVATURE; LOCAL SURFACES; MEASUREMENT METHODS; NANO METER RANGE; NANOMETER RESOLUTIONS; OBJECT GEOMETRIES; OBJECT SHAPE; OBJECT SURFACE; REFLECTIVE SURFACES; REFLECTOMETRY; SILICON MIRRORS; SUBNANOMETER RESOLUTION; SUBNANOMETERS; SURFACE SHAPE; SURFACE TOPOLOGY; SURFACE UNDER TESTS; VIBRATION ISOLATIONS; WHITE LIGHT; SHAPE; TOPOMETRY;

CLIMATE CONTROL; IMAGE PROCESSING; INTERFEROMETERS; NANOTECHNOLOGY; QUALITY CONTROL; QUALITY FUNCTION DEPLOYMENT; REFLECTION; REFLECTOMETERS; TOTAL QUALITY MANAGEMENT; TURNING; MICROMANIPULATORS; OPTICAL CORRELATION; CARBON NANOTUBES; GRAPHITE; INSPECTION; NANOSTRUCTURED MATERIALS; SURFACE CHEMISTRY;

INTERFEROMETRY;

EID: 70449674853     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.838373     Document Type: Conference Paper

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