High speed fringe reflection technique for nm resolution topometry of diamond turned free form mirrors

EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology

Volumn , Issue , 2005, Pages 25-28

  Gläbe, Ralf ^a   Flucke, Christian ^a   Bothe, Thorsten ^b   Brinksmeier, Ekkard ^a  

^a UNIVERSITY OF BREMEN   (Germany)

^b BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; SURFACE MEASUREMENT;

FREE-FORM SURFACE; FRINGE PROJECTION; FRINGE REFLECTIONS; HIGH RESOLUTION; LATERAL RESOLUTION; MEASURING POINTS; NANOMETER RESOLUTIONS; VERTICAL RESOLUTION;

PRECISION ENGINEERING;

EID: 84919951342     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Hung, Y.Y., Lin, L., Shang, H.M., Park, B.G.: Practical three-dimensional computer vision techniques for full-field surface measurement; Opt. Eng. 39 (1), 2000, p. 143-149
2. Bothe, T., Li, W., Kopylow, C., Jüptner, W. (2004): High Resolution 3D Shape Measurement on specular surfaces by fringe reflection, Proc. SPIE Int. Soc. Opt. Eng. 5457, p. 411-422
3. Li, W., Bothe, T., Kopylow, C., Jüptner, W. (2004): Evaluation Methods for Gradient Measurement Techniques, Proc. SPIE Int. Soc. Opt. Eng. 5457, p. 300-311
4. Gessenharter, A.; Autschbach, L.; Grimme, D.; Riemer, O.; Brinksmeier, E.: Ultraprecision Machining and Polishing of Structured Molds, Annals of the WGP, Production Engineering Vol. XI/1 (2004), p. 11-14