Growth and characterizations of ZnO nanorod/film structures on copper coated Si substrates

Thin Solid Films

Volumn 518, Issue 5, 2009, Pages 1549-1552

  Wu, Wan Yu ^a   Chen, Ming Ta ^a   Ting, Jyh Ming ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Electroless Cu; Sputter deposition; ZnO nanorods

Indexed keywords

DEPOSITION PRESSURES; DEPOSITION PROCESS; DEPOSITION TIME; ELECTRODE DISTANCES; ELECTROLESS COPPER; ELECTROLESS CU; RF MAGNETRONS; RF POWER; ROOM TEMPERATURE; SI SUBSTRATES; ZNO; ZNO FILMS; ZNO NANOROD; ZNO NANORODS;

CHEMICAL VAPOR DEPOSITION; COPPER DEPOSITS; DEPOSITS; NANORODS; SEMICONDUCTING ZINC COMPOUNDS; SPUTTER DEPOSITION; ZINC OXIDE;

FILM GROWTH;

EID: 70449488920     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.108     Document Type: Article

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