Production of silicon mirror plates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7437, Issue , 2009, Pages

  Riekerink, Marinus B Olde ^a   Lansdorp, Bob ^a   Vreede, Lennart J De ^a   Blom, Marko T ^a   Oever, Ronny Vant ^a   Ackermann, Marcelo D ^b   Collon, Maximilien J ^b   Wallace, Kotska ^c   Bavdaz, Marcos ^c  

^a Micronit Microfluidics   (Netherlands)

^b Cosine Research BV ^*  (Netherlands)

^c EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

Manufacturing; Mirror plates; Pore optics; Silicon; Wafer; X ray astronomy; X ray optics; X ray telescopes

Indexed keywords

MANUFACTURING; PORE OPTICS; WAFER; X-RAY ASTRONOMY; X-RAY TELESCOPES;

ASTRONOMICAL SATELLITES; ASTROPHYSICS; COST REDUCTION; MACHINE TOOLS; MANUFACTURE; MIRRORS; OPTICAL TELESCOPES; PRODUCTION ENGINEERING; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; SILICON WAFERS; SPACECRAFT EQUIPMENT; ULTRAVIOLET DEVICES; X RAYS;

GAMMA RAYS;

EID: 70449369445     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.825960     Document Type: Conference Paper

References (7)

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7. Jensen, C.P. et al., "Coating of silicon pore optics, " Proc. SPIE 7437-34, (2009).