Geometric aspects of AFM imaging

Russian Microelectronics

Volumn 37, Issue 6, 2008, Pages 390-409

  Novikov, Yu A ^a   Rakov, A V ^a   Todua, P A ^b  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b Center for Surface and Vacuum Research   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPIC EXAMINATION;

AFM IMAGING; CALIBRATION PROCEDURES; DIRECT MEASUREMENTS; IMAGE GENERATIONS; LINEAR DIMENSIONS; SURFACE PATTERNS;

ATOMIC FORCE MICROSCOPY;

EID: 55849114099     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063739708060061     Document Type: Article

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