Spun-cast micromolding for etchless micropatterning of electrically functional PDMS structures

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  McClain, Maxine A ^a   Laplaca, Michelle C ^b   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCESS POINTS; BIOMEMS; BULK MATERIALS; COMPLEX STRUCTURE; HIERARCHICAL APPLICATIONS; INSULATING LAYERS; MICRO PATTERNING; MICROCABLES; MICROMOLDING; PLASMA PROCESSING; POLYDIMETHYLSILOXANE PDMS; SURROUNDING MATERIALS;

CABLES; ELECTRONIC STRUCTURE; MECHANICAL PROPERTIES; MICROCHANNELS; MICROMACHINING; SILICON SENSORS;

SILICONES;

EID: 70350655991     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/107002     Document Type: Article

References (14)

1. Garra J, Long T, Currie J, Schneider T, White R and Paranjape M 2002 Dry etching of polydimethylsiloxane for microfluidic systems J. Vac. Sci. Technol. A 20 975-82
2. Graubner V M, Jordan R, Nuyken O, Lippert T, Hauer M, Schnyder B and Wokaun A 2002 Incubation and ablation behavior of poly(dimethylsiloxane) for 266 nm irradiation Appl. Surf. Sci. 197 786-90
3. Linder V, Gates B D, Ryan D, Parviz B A and Whitesides G M 2005 Water-soluble sacrificial layers for surface micromachining Small 1 730-6
4. Maiti M, Bhattacharya M and Bhowmick A K 2008 Elastomer nanocomposites Rubber Chem. Technol. 81 384-469
5. Mark J E 2006 Some novel polymeric nanocomposites Acc. Chem. Res. 39 881-8
6. Meacham K W, Giuly R J, Guo L, Hochman S and DeWeerth S P 2008 A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord Biomed. Microdevices 10 259-69
7. Nam Y, Musick K and Wheeler B C 2006 Application of a PDMS microstencil as a replaceable insulator toward a single-use planar microelectrode array Biomed. Microdevices 8 375-81
8. Ostuni E, Kane R, Chen C S, Ingber D E and Whitesides G M 2000 Patterning mammalian cells using elastomeric membranes Langmuir 16 7811-9
9. Palmer C 1978 Microwire technique for recording single neurons in unrestrained animals Brain Res. Bull. 3 285-9
10. Sayah A, Parashar V K and Gijs M A M 2007 LF55GN photosensitive flexopolymer: a new material for ultrathick and high-aspect-ratio MEMS fabrication J. Microelectromech. Syst. 16 564-70
11. Sia S K and Whitesides G M 2003 Microfluidic devices fabricated in poly(dimethylsiloxane) for biological studies Electrophoresis 24 3563-76
12. Someya T, Sekitani T, Iba S, Kato Y, Kawaguchi H and Sakurai T 2004 A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications Proc. Natl Acad. Sci. USA 101 9966-70
13. Wolfe D B, Love J C, Gates B D, Whitesides G M, Conroy R S and Prentiss M 2004 Fabrication of planar optical waveguides by electrical microcontact printing Appl. Phys. Lett. 84 1623-5
14. Yu Z, Lacour S P, Tsay C, Wagner S and Morrison B 2006 A new tool to study post-traumatic neuronal dysfunction: stretchable microelectrode arrays J. Neurotrauma 23 P49