Bonding technique of polymer layer with ceramic elements of analytical microsystems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6348, Issue , 2006, Pages

  Chudy, Michał ^a   Malecha, Karol ^b   Golonka, Leszek ^b   Sosicki, Adam ^b   Roguszczak, Henryk ^b   Jakubowska, Małgorzata ^c   Dybko, Artur ^a   Brzózka, Zbigniew ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c Research Group of Integrated Circuits and System Design   (Poland)

Author keywords

Bonding; Ceramics; LTCC; Microsystem; PDMS

Indexed keywords

ADHESION; BONDING; CERAMIC MATERIALS; ELECTROOSMOSIS; POLYMERS; SURFACE ROUGHNESS;

ELECTROOSMOTIC REAGENTS; LTCC; MICROFLUIDIC STRUCTURES; MICROSYSTEMS; PDMS; POLYMER LAYERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33846256655     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.721108     Document Type: Conference Paper

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