Investigation and application of an ultrahydrophobic hybrid-structured surface with anti-sticking character

Journal of Micromechanics and Microengineering

Volumn 19, Issue 8, 2009, Pages

  Yang, Zong Han ^a   Chiu, Chao Yang ^a   Yang, Jing Tang ^b   Yeh, J Andrew ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; GIBBS SURFACE; HIGHLY INTEGRATED; INTERFACIAL CHARACTERISTICS; LOTUS LEAF; MASS PRODUCTION; MICROLITERS; NANOSTRUCTURED SURFACE; PATTERN DENSITY; SEM; SILICON SUBSTRATES; SILICON SURFACES; SOLID SURFACE; STRUCTURED SURFACES; TEST SURFACES; ULTRAHYDROPHOBIC; ULTRAHYDROPHOBIC SURFACES;

CONTACT ANGLE; DROP FORMATION; HYDROPHOBICITY; MONOLAYERS; SURFACE CHEMISTRY; SURFACE ROUGHNESS; SURFACE TENSION;

NANOCRYSTALS;

EID: 70350627398     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/8/085022     Document Type: Article

References (30)

1. Barthlott W and Neinhuis C 1997 Purity of the sacred lotus, or escape from contamination in biological surfaces Planta 202 1-8
2. Herminghaus S 2000 Roughness-induced non-wetting Europhys. Lett. 52 165-70
3. Patankar N A 2004 Mimicking the lotus effect: influence of double roughness structures and slender pillars Langmuir 20 8209-13
4. Zheng Y M, Gao X F and Jiang L 2007 Directional adhesion of superhydrophobic butterfly wings Soft Matter 3 178-82
5. Cheng Y T, Rodak D E, Angelopoulos A and Gacek T 2005 Microscopic observations of condensation of water on lotus leaves Appl. Phys. Lett. 87 194112-4
6. Bayer S and Megaridis C M 2006 Contact angle dynamics in droplets impacting on flat surfaces with different wetting characteristics J. Fluid. Mech. 558 415-49
7. Yu Y, Zhao Z H and Zheng Q S 2007 Mechanical and superhydrophobic stabilities of two-scale surfacial structure of lotus leaves Langmuir 23 8212-6
8. Zheng Y, Han D, Zhai J and Jiang L 2008 In situ investigation on dynamic suspending of a microdroplet on a lotus leaf and gradient of wettable micro- and nanostructure from water condensation Appl. Phys. Lett. 92 084106-8
9. Callies M and Quere D 2005 On water repellency Soft Matter 1 55-61
10. Janssen D, Palma R D, Verlaak S, Heremans P and Dehaen W 2006 Static solvent contact angle measurements, surface free energy and wettability determination of various self-assembled monolayers on silicon dioxide Thin Solid Film 515 1433-8
11. Zhuang Y X, Hansen O, Knieling T, Wang C, Rombach P, Lang W, Benecke W, Kehlenbeck M and Koblitz J 2007 Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS J. Microelectromech. Syst. 16 1451-60
12. Ashurst W R, Carraro C and Maboudian R 2003 Vapor phase anti-sticking coatings for MEMS IEEE Trans. Device Mater. Reliab. 3 173-8
13. Yoshimitsu Z, Nakajima A, Watanabe T and Hashimoto K 2002 Effects of surface structure on the hydrophobicity and sliding behavior of water droplets Langmuir 18 5818-22
14. Shirtcliffe N J, Aqil S, Evans C, McHale G, Newton M I, Perry C C and Roach P 2004 The use of high-aspect-ratio photoresist (SU-8) for superhydrophobic pattern prototyping J. Micromech. Microeng. 14 1384-9
15. Yang J T, Chen J H, Huang K J and Yeh A J 2006 Droplet manipulation on a hydrophobic textured surface with roughened patterns J. Microelectromech. Syst. 15 697-707
16. Bhushan B and Jung Y C 2007 Wetting study of patterned surfaces for superhydrophobicity Ultramicroscopy 107 1033-41
17. Zhang M L, Peng K Q, Fan X, Jie J S, Zhang R Q, Lee S T and Wong N B 2008 Preparation of large-area uniform silicon nanowires arrays through metal-assisted chemical etching J. Phys. Chem. C 112 4444-50
18. Guo Z G, Liu W M and Su B L 2008 A stable lotus-leaf-like water-repellent copper Appl. Phys. Lett. 92 063104-6
19. 3 films Nanotechnology 19 165604-9
20. Lee S M, Jung I D and Ko J S 2008 The effect of the surface wettability of nanoprotrusions formed on network-type microstructures J. Micromech. Microeng. 18 125007
21. Kwon Y, Patankar N A, Choi J and Lee J 2009 Design of surface hierarchy for extreme hydrophobicity Langmuir 25 6129-36
22. Lee S M and Kwon T H 2007 Effects of intrinsic hydrophobicity on wettability of polymer replicas of a superhydrophobic lotus leaf J. Micromech. Microeng. 17 687-92
23. Wang Z, Koratkar N, Ci L and Ajayan P M 2007 Combined micro-/nanoscale surface roughness for enhanced hydrophobic stability in carbon nanotube arrays Appl. Phys. Lett. 90 143117-9
24. Van Der Wal P and Steiner U 2007 Super-hydrophobic surfaces made from Teflon Soft Matter 3 426-9
25. Bhushan B, Koch K and Jung Y C 2008 Nanostructures for superhydrophobicity and low adhesion Soft Matter 4 1799-804
26. Wenzel R N 1936 Resistance of solid surfaces to wetting by water Ind. Eng. Chem. 28 988-94
27. Cassie A B D and Baxter S 1944 Wettability of porous surfaces Trans. Faraday Soc. 40 546-50
28. Patankar N A 2003 On the modeling of hydrophobic contact angles on rough surfaces Langmuir 19 1249-53
29. Yang J T, Yang Z H, Chen C Y and Yao D J 2008 Conversion of surface energy and manipulation of a single droplet across micropatterned surfaces Langmuir 24 9889-97
30. Chyan J Y, Hsu C W and Yeh J A 2009 Broadband antireflective poly-Si nanosponge for thin film solar cells Opt. Express 17 4646-51