Influence of diffused boron into MgO barrier on pinhole creation in CoFeB/MgO/CoFeB magnetic tunnel junctions

IEEE Transactions on Magnetics

Volumn 45, Issue 10, 2009, Pages 3453-3456

  Komagaki, Koujiro ^a   Hattori, Masashi ^a   Noma, Kenji ^a   Kanai, Hitoshi ^a   Kobayashi, Kazuo ^a   Uehara, Yuji ^a   Tsunoda, Masakiyo ^b   Takahashi, Migaku ^b  

^a FUJITSU LABORATORIES LTD   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Brrier pinholes; CoFeB; Diffused boron; Grain boundary; In situ heating; Magnetic tunnel junctions (MTJs); MgO

Indexed keywords

BORON; COBALT COMPOUNDS; GIANT MAGNETORESISTANCE; GRAIN BOUNDARIES; MAGNESIA; MAGNETIC DEVICES; OXIDE MINERALS; SECONDARY ION MASS SPECTROMETRY; TUNNEL JUNCTIONS;

BREAK DOWN VOLTAGE; BRRIER PINHOLES; CAPPING LAYER; COFEB; IN-SITU HEATING; MAGNETIC TUNNEL JUNCTION; MGO BARRIER; THREE DIFFERENT TECHNIQUES;

IRON COMPOUNDS;

EID: 70350582941     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2009.2022189     Document Type: Article

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