Investigation of light extraction of InGaN LEDs with surface-textured indium tin oxide by holographic and natural lithography

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 15, Issue 5, 2009, Pages 1327-1331

  Horng, Ray Hua ^a   Tsai, Yu Li ^a   Wu, Tzong Ming ^a   Wuu, Dong Sing ^a   Chao, Chia Hsin ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Holographic lithography; LED; Natural lithography; Surface texturing

Indexed keywords

ARRAY PATTERNS; DRY ETCHING PROCESS; HOLOGRAPHIC LITHOGRAPHY; INDIUM TIN OXIDE; INGAN LED; INJECTION CURRENTS; IV CHARACTERISTICS; LED; LED CHIPS; LIGHT EXTRACTION; LIGHT OUTPUT POWER; MAXIMUM POWER; NATURAL LITHOGRAPHY; POLYSTYRENE SPHERES; REGULAR PATTERNS; SURFACE TEXTURING;

INDIUM; PHOTOLITHOGRAPHY; POLYSTYRENES; TEXTURING; TIN;

LIGHT;

EID: 70350180380     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2013971     Document Type: Conference Paper

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