Silicon-based megahertz ultrasonic nozzles for production of monodisperse micrometer-sized droplets

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 56, Issue 9, 2009, Pages 1968-1979

  Tsai, Shirley C ^a,b   Cheng, Chih H ^c   Wang, Ning ^b   Song, Yu L ^b,d   Lee, Ching T ^d   Tsai, Chen S ^b,c  

^a CALIFORNIA STATE UNIVERSITY   (United States)

^b University of California at Irvine   (United States)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

3D FINITE-ELEMENT SIMULATION; CAPILLARY WAVE; CRITICAL VALUE; DROPLET DIAMETERS; ELECTRICAL DRIVES; ETHANOL DROPLET; FARADAY INSTABILITY; FLOQUET EXPONENTS; FOURIER; FREE SURFACES; MICROELECTROMECHANICAL SYSTEMS; MONODISPERSE; MONODISPERSE DROPLETS; NOZZLE TIP; RESONANCE FREQUENCIES; SILICON-BASED; TEMPORAL INSTABILITY; ULTRASONIC ATOMIZATION; ULTRASONIC NOZZLE; UNDERLYING MECHANISM; UNSTABLE SOLUTIONS; VIBRATION AMPLITUDE; WATER DROPLETS;

ATOMIZATION; ATOMIZERS; DIFFERENTIAL EQUATIONS; DROP FORMATION; ETHANOL; JETS; LIQUID FILMS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONANCE; ULTRASONICS;

NOZZLES;

EID: 70350144295     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2009.1273     Document Type: Article

References (43)

1. S. A. Elrod, B. Hadimioglu, B. T. Khuri-Yakub, E. G. Rawson, E. Richley, and C. F. Quate, "Nozzleless droplet formation with focused acoustic beams," J. Appl. Phys., vol.65, pp. 3441-3447, 1989.
2. D. Hung and E. S. Kim, "Micromachined acoustic-wave liquid ejector," J. Microelectromech. Syst., vol.10, pp. 442-449, Sep. 2001.
3. J. M. Meacham, M. J. Varady, F. L. Degertekin, and A. G. Fedorov, "Droplet formation and ejection from a micromachined ultrasonic droplet generator: Visualization and scaling," Phys. Fluids, vol.17, no.10, art. no. 100605, 2005.
4. J. M. Meacham, C. Ejimofor, S. Kumar, F. L. Degertekin, and A. G. Fedorov, "Micromachined ultrasonic droplet generator based on a liquid horn structure," Rev. Sci. Instrum., vol.75, pp. 1347-1352, May 2004.
5. B. de Heji, B. van der Schoot, H. Ho, J. Hess, and N. F. de Rooij, "Characterization of a fL droplet generator for inhalation drug therapy," Sens. Actuators, vol.85, pp. 430-434, 2000.
6. G. Percin and B. T. Khuri-Yakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers-I: Theory," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol.49, pp. 573-584, May 2002. (Pubitemid 34771326)
7. N. Maehara, S. Ueha, and E. Mori, "Influence of the vibrating system of a multipinhole-plate ultrasonic nebulizer on its performance," Rev. Sci. Instrum., vol.57, no.11, pp. 2870-2876, 1986.
8. O. S. Usmani, M. F. Biddiscombe, and P. J. Barnes, "Regional lung deposition and bronchodilator response as a function of ?2-agonist particle size," Am. J. Respir. Crit. Care Med., vol.172, pp. 1497- 1504, Dec. 2005.
9. S. Sangwan, R. Condos, and G. C. Smaldone, "Lung deposition and respirable mass during wet nebulization," J. Aerosol Med., vol.16, no.4, pp. 379-386, 2003.
10. D. A. LaVan, T. McGuire, and R. Langer, "Small-scale systems for in vivo drug delivery," Nat. Biotechnol., vol.21, pp. 1184-1191, Oct. 2003.
11. S. C. Tsai, Y. L. Song, T. K. Tseng, Y. F. Chou, W. J. Chen, and C. S. Tsai, "High frequency silicon-based ultrasonic nozzles using multiple fourier horns," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol.51, pp. 277-286, Mar. 2004.
12. A. Lal and R. M. White, "Micromachined silicon ultrasonic atomizer," in Proc. IEEE Ultrasonics Symp., vol.1, 1996, pp. 339-342.
13. R. Lang, "Ultrasonic atomization of liquids," J. Acoust. Soc. Am., vol.34, pp. 6-8, 1962.
14. E. Eisner, "Design of sonic amplitude transformers for high magnification," J. Acoust. Soc. Am., vol.35, no.9, pp. 1367-1377, 1963.
15. S. C. Tsai, Y. L. Song, C. S. Tsai, Y. F. Chou, and C. H. Cheng,. "Ultrasonic atomization using MHz silicon-based multiple-Fourier horn nozzles," Appl. Phys. Lett., vol.88, art. no.014102, Jan. 2006.
16. J. J. Wortman and R. A. Evans, "Young's modulus, shear modulus, and Poisson's ratio in silicon and germanium," J. Appl. Phys., vol.36, pp. 153-156, 1965.
17. B. A. Auld, "Piezoelectricity," in Acoustic Fields and Waves in Solids, vol.1. New York: Wiley-Interscience, 1973, chap. 8.
18. E. D. Hirleman, V. Oechsle, and N. A. Chigier, "Response characteristics of laser diffraction particle size analyzers: Optical sample volume extent and lens effects," Opt. Eng., vol.23, pp. 610-619, Oct. 1984.
19. E. M. Odom and D. A. Adams, "An investigation of the isotropy of epoxy polymers," J. Mater. Res., vol.7, pp. 3352-3358, Dec. 1992.
20. R. C. Weast, Ed., Handbook of Chemistry and Physics, 55th ed., Cleveland, OH: CRC Press, 1975.
21. M. Faraday, "On a peculiar class of acoustical figures and on certain forms assumed by groups of particles upon vibrating elastic surfaces," Philos. Trans. R. Soc. Lond., vol.A52, pp. 299-340, 1831.
22. Lord Rayleigh, "On the crispation of fluid resting upon a vibrating support," Philos. Mag., vol.16, no.5, pp. 50-58, 1883.
23. T. B. Benjamin and F. Ursell, "The stability of the plane free surface of a liquid in vertical periodic motion," Proc. R. Soc. Lond. A, vol.225, pp. 505-515, 1954.
24. G. S. Guthart and T. Y.-T Wu, "Observation of a standing kink cross wave parametrically excited," Proc. R. Soc. Lond. A, vol.434, pp. 435-440, 1991.
25. W. S. Edwards and S. Fauve, "Parametrically excited quasicrystalline surface waves," Phys. Rev. E, vol.47, pp. R788-R791, Feb. 1993.
26. K. Kumar, "Linear theory of Faraday instability in viscous liquids," Proc. R. Soc. Lond. A, vol.452, pp. 1113-1126, 1996.
27. E. A. Cerda and E. L. Tirapegui, "Faraday's instability for viscous fluids," Phys. Rev. Lett., vol.78, no.5, pp. 859-862, 1997.
28. E. A. Cerda and E. L. Tirapegui, "Faraday's instability in viscous fluid," J. Fluid Mech., vol.368, pp. 195-228, Aug. 1998.
29. C. L. Goodridge, H. G. E. Hentschel, and D. P. Lathrop, "Breaking Faraday waves: Critical slowing of droplet ejection rates," Phys. Rev. Lett., vol.82, pp. 3062-3065, Aug. 1999.
30. S. Kumar, "Parametrically driven surface waves in viscoelastic liquids," Phys. Fluids, vol.11, pp. 1970-1981, 1999.
31. D. Sindayihebura and L. Bolle, "Ultrasonic atomization of liquids: Stability analysis of the viscous liquid free surface," Atomization Sprays, vol.8, pp. 217-233, 1998.
32. A. J. Yule and Y. Al-Suleimani, "On droplet formation from capillary waves on a vibrating surface," Proc. R. Soc. Lond. A, vol.456, pp. 1069-1085, 2000.
33. D. Sindayihebura, M. Dobre, and L. Bolle, "Experimental study of thin liquid film ultrasonic atomization,"in Proc. 4th World Conf. Experimental Heat Transfer, Fluid Mechanics, and Thermodynamics, Brussels, Belgium, 1997, pp. 1-7.
34. H. E. Snyder and R. D. Reitz, "Direct droplet production from a liquid film: A new gas-assisted atomization mechanism," J. Fluid Mech., vol.375, pp. 363-381, 1998.
35. B. K. Shivamoggi, Perturbation Methods for Differential Equations. Boston: Birkhauser, 2003, pp. 97-99.
36. Lord Rayleigh, "On the maintenance of vibrations by forces of double frequency, and on the propagation of waves through a medium endowed with a periodic structure," Philos. Mag., vol.24, no.147, pp. 145-159, Aug. 1887.
37. F. Barreras, H. Amaveda, and A. Lozano, "Transient high-frequency ultrasonic water atomization," Exp. Fluids, vol.33, pp. 405-413, 2002.
38. S. C. Tsai, P. Luu, P. Childs, A. Teshome, and C. S. Tsai, "The role of capillary waves in two-fluid atomization," AIP, Phys. Fluids, vol.9, pp. 2909-2918, Oct. 1997.
39. R. N. Berglund and B. Y. H. Liu, "Generation of monodisperse aerosol standards," Environ. Sci. Technol., vol.7, pp. 147-153, 1973.
40. J. Mathews and R. L. Walker, Mathematical Methods of Physics. New York: W. A. Benjamin Inc., 1965, pp. 189-195.
41. C. H. Hayashi, Forced Oscillations in Non-Linear Systems. Tokyo: Nippon Printing and Publishing Co., 1953, pp. 4-10.
42. S. C. Tsai, Y. L. Song, C. S. Tsai, C. C. Yang, W. Y. Chiu, and H. M. Lin, "Ultrasonic spray pyrolysis for nanoparticles synthesis," J. Mater. Sci., vol.39, pp. 3647-3657, 2004.
43. J. D. Achenbach, Wave Propagation in Elastic Solids. New York: North-Holland, 1973, pp. 65-66.