Micromachined ultrasonic droplet generator based on a liquid horn structure

Review of Scientific Instruments

Volumn 75, Issue 5 PART 1, 2004, Pages 1347-1352

  Meacham, J M ^a   Ejimofor, C ^a   Kumar, S ^a   Degertekin, F L ^a   Fedorov, A G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DROP-ON-DEMAND FLUID ATOMIZATION; DROPLET INJECTION; MICROFABRICATION; MICROMACHINED ULTRASONIC DROPLET GENERATORS; THERMAL INK JET METHOD;

ATOMIZATION; CAVITY RESONATORS; COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ETCHING; FINITE ELEMENT METHOD; NOZZLES; PIEZOELECTRIC TRANSDUCERS; PRESSURE EFFECTS; PYROLYSIS; RESONANCE; SILICON WAFERS; SURFACE TENSION; THIN FILMS; ULTRASONIC TRANSDUCERS;

MICROMACHINING;

EID: 3042598277     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1711187     Document Type: Article

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