High-Frequency, Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Horns

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 3, 2004, Pages 277-285

  Tsai, Shirley C ^a,b   Song, Yu L ^a   Tseng, Terry K ^a   Chou, Yuan F ^c   Chen, Wei J ^a   Tsai, Chen S ^a,d  

^a ACADEMIA SINICA   (Taiwan)

^b CALIFORNIA STATE UNIVERSITY   (United States)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZATION; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NOZZLES; PIEZOELECTRIC TRANSDUCERS; RESONATORS; SILICON; VIBRATIONS (MECHANICAL);

HARMONIC FREQUENCIES; MULTIPLE FOURIER HORNS; ULTRASONIC NEBULIZERS; ULTRASONIC NOZZLES;

ULTRASONIC DEVICES;

EID: 2342582233     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1320783     Document Type: Article

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